<title>Carbon and ceramic microcoils for MEMS by microwave CVD</title>

Abstract

In this paper, synthesis of carbon and ceramic microcoils by microwave chemical vapor deposition method is presented. Carbon microcoils were synthesized over nickel catalyst using acetylene as carbon source by microwave technique. Titanium carbide microcoils were gained by direct titanization to carbon microcoils. A comparison is given between conventional thermal filament CVD and microwave CVD methods. Particular attention is given to the potential applications ofcarbon and ceramic microcoils for MEMS.

Synthesis of carbon nanocoils by microwave CVD

“…This difference of carbon fibre extrusion speed is the reason for the formation of microcoils. In the microwave chemical vapour deposition method, the temperature gradient around the Ni particles is believed to be the reason for the anisotropic properties of the catalysts [21]. The growth mechanism of carbon nanocoils has not yet been completely clarified.…”