PbTiO 3 /SrTiO 3 superlattices were grown on ͑001͒ SrTiO 3 substrates by reactive molecular beam epitaxy ͑MBE͒. Sharp superlattice reflections were observed by x-ray diffraction. High-resolution transmission electron microscopy of a ͓͑PbTiO 3 ͒ 10 /͑SrTiO 3 ͒ 10 ͔ 15 superlattice revealed that the PbTiO 3 /SrTiO 3 interface structure is atomically sharp. The superlattice interfaces are fully coherent; no misfit dislocations or other crystal defects were observed in the superlattice by transmission electron microscopy. Selected area electron diffraction patterns indicated that the PbTiO 3 layers are oriented with the c axis parallel to the growth direction. The dimensional control and interface abruptness achieved in this model system indicate that MBE is a viable method for constructing oxide multilayers on a scale where enhanced dielectric effects are expected.
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