2001
DOI: 10.1016/s0921-5107(01)00726-7
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Oxide nano-engineering using MBE

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Cited by 189 publications
(116 citation statements)
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“…The structural quality of oxide films grown by MBE now matches that of epitaxial semiconductors [1]. Stoichiometry control, however, remains a major challenge [2]. A number of approaches have been developed to avoid oxygen deficiency, including, for example, the use of reactive oxidants such as ozone [3] or sources that supply transition metals already bonded to oxygen [4].…”
mentioning
confidence: 99%
“…The structural quality of oxide films grown by MBE now matches that of epitaxial semiconductors [1]. Stoichiometry control, however, remains a major challenge [2]. A number of approaches have been developed to avoid oxygen deficiency, including, for example, the use of reactive oxidants such as ozone [3] or sources that supply transition metals already bonded to oxygen [4].…”
mentioning
confidence: 99%
“…However, the rate of cation interdiffusion between the Ba sites and Sr sites in these perovskites is very slow at the growth temperature used here. 19 Figure 1b is a typical BF TEM image of the BTO/STO multilayered film grown on a LAO substrate with a thickness of about 1 μm. It can be clearly seen that the interface between the substrate and the superlattice film is fairly flat and sharp, and the film exhibits a columnar structure.…”
Section: Methodsmentioning
confidence: 99%
“…These opportunities are a direct consequence of reduced dimensionality and/or interfacial phenomena from proximity effects between dissimilar materials Zubko et al (2011). Progress in growth techniques Chambers (2010); Eckstein & Bozovic (1995); Martin et al (2010); McKee et al (1998); Posadas et al (2007); Reiner et al (2009) ;Schlom et al (1992); Vaz et al (2009a); Vrejoiu et al (2008), nanoscale characterization tools Zhu (2005), and first principles calculations Cohen (2000); Fennie (2008); Picozzi & Ederer (2009); Rabe & Ghosez (2007); Spaldin & Pickett (2003); have been instrumental to our present ability to control matter down to the atomic scale and to fabricate nanoscale device structures with the potential for technological applications. Examples of current research work that aims at addressing some of the current grand challenges include the search for ultrasensitive sensors and actuators for applications in areas such as medicine and energy harvesting, the development of smaller and more energy efficient electronic devices that could replace current CMOS switches, and the design of intelligent systems that incorporate complex operations at the core processing level.…”
Section: Introductionmentioning
confidence: 99%