This paper presents the design, fabrication and test of high-Q high-frequency lateral-mode clamped-clamped beam micro-resonators driven by parallel-plate electrostatic transducers fabricated in a thick epipoly technology. An innovative approach is employed to reduce an intrinsically high transducer gap value (>3.0 µm) required by the need of 15 µm thick structural layer etching down to 0.2-0.4 µm after the fabrication. This is achieved by employing an electrostatic motor that approaches the actuating and sensing electrodes close to the resonator. The electrode motor is driven with 30 V dc voltage, without any dc current consumption. Two resonators having a resonance frequency of 10 MHz have been fabricated with gap values of respectively 0.2 and 0.4 µm. A comparative analysis of performances of the two resonators is given in the paper.
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