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In this work a systematic comparison of total reflection X-ray fluorescence ͑TXRF͒, synchrotron radiation-TXRF ͑SR-TXRF͒, time of flight secondary ion mass spectroscopy, lifetime, and deep level transient spectroscopy data of iron concentration is carried out. SR-TXRF is considered as a reference for the other techniques. Reasonably good correlations are obtained, though, as expected, SR-TXRF exhibits the maximum sensitivity among surface techniques. Among lifetime measurements, the electrolytic metal analysis tool ͑ELYMAT͒ technique shows the best sensitivity at very low concentrations. A method is developed to elaborate ELYMAT data in order to quantify iron concentration when more contaminants are simultaneously present.

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