Abstract-This paper explores contact heating in microelectromechanical systems (MEMS) switches with contact spot sizes less than 100 nm in diameter. Experiments are conducted to demonstrate that contact heating causes a drop in contact resistance. However, existing theory is shown to over-predict heating for MEMS switch contacts because it does not consider ballistic transport of electrons in the contact. Therefore, we extend the theory and develop a predictive model that shows excellent agreement with the experimental results. It is also observed that mechanical cycling causes an increase in contact resistance. We identify this effect as related to the build-up of an insulating film and demonstrate operational conditions to prevent an increase in contact resistance. The improved understanding of contact behavior gained through our modeling and experiments allows switch performance to be improved.[1424]

By integrating interferometric deflection data from electrostatically actuated microcantilevers with a numerical finite difference model, we have developed a step-by-step procedure to determine values of Young's modulus while simultaneously quantifying nonidealities. The central concept in the methodology is that nonidealities affect the long-range deflections of the beams, which can be determined to near nanometer accuracy. Beam takeoff angle, curvature and support post compliance are systematically determined. Young's modulus is then the only unknown parameter, and is directly found. We find an average value of Young's modulus for polycrystalline silicon of 164.3 GPa and a standard deviation of 3.2 GPa (2%), reflecting data from three different support post designs. Systematic errors were assessed and may alter the average value by 5%. An independent estimate from grain orientation measurements yielded 163.4-164.4 GPa (the Voigt and Reuss bounds), in agreement with the step-by-step procedure. Other features of the test procedure include that it is rapid, nondestructive, verifiable and requires only a small area on the test chip. [619] Index Terms-Free-standing thin films, characterization, mechanical properties, statistical accuracy assessments. I. INTRODUCTION K NOWLEDGE of mechanical properties is critical to the design of MEMS. Nanoindentation [1] is commonly used to determine properties of thin films attached to a substrate, but substrate compliance and tip shape effects introduce considerable complexity into analysis methods (see, for example, [2] and references, therein). Free standing thin-film structures are Manuscript

This paper explores the deflection and buckling of fixed-guided beams used in compliant mechanisms. The paper’s main contributions include the addition of an axial deflection model to existing beam bending models, the exploration of the deflection domain of a fixed-guided beam, and the demonstration that nonlinear finite element models typically incorrectly predict a beam’s buckling mode unless unrealistic constraints are placed on the beam. It uses an analytical model for predicting the reaction forces, moments, and buckling modes of a fixed-guided beam undergoing large deflections. The model for the bending behavior of the beam is found using elliptic integrals. A model for the axial deflection of the buckling beam is also developed. These two models are combined to predict the performance of a beam undergoing large deflections including higher order buckling modes. The force versus displacement predictions of the model are compared to the experimental force versus deflection data of a bistable mechanism and a thermomechanical in-plane microactuator (TIM). The combined models show good agreement with the force versus deflection data for each device.

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A bistable mechanism has two stable states within its range of motion. Its advantages include the ability to stay in two positions without power input and despite small external disturbances. Therefore, bistable micro-mechanisms could allow the creation of MEMS with improved energy efficiency and positioning accuracy. This paper presents bistable micro-mechanisms which function within the plane of fabrication. These bistable mechanisms, called “Young” bistable mechanisms, obtain their energy storage characteristics from the deflection of two compliant members. They have two pin joints connected to the substrate, and can be constructed of two layers of polysilicon. The pseudo-rigid-body model is used to analyze and design these mechanisms. This approach allows greater freedom and flexibility in the design process. The mechanisms were fabricated and tested to demonstrate their bistable behavior and to determine the repeatability of their stable positions.

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This paper presents the design, fabrication, and testing of a miniature latching accelerometer that does not require electrical power. Latching is attained by using a bistable compliant mechanism that switches from one mechanical position to another when the force on the accelerometer exceeds a threshold value. Accelerometers were fabricated by laser cutting the compliant mechanism switch out of both ABS and Delrin plastic sheets. Packaging consisted of gluing the single compliant layer to a supporting substrate. The switching thresholds of the accelerometers were varied from 10g to 800g by varying the surface area of the free moving section between 100 and 500 mm2.

Electrostatic comb drives are widely used in microelectromechanical devices. These comb drives often employ rectangular fingers which produce a stable, constant force output as they engage. This paper explores the use of shapes other than the common rectangular fingers. Such shaped comb fingers allow customized force-displacement response for a variety of applications. In order to simplify analysis and design of shaped fingers, a simple model is developed to predict the force generated by shaped comb fingers. This model is tested using numerical simulation on several different sample shaped comb designs. Finally, the model is further tested, and the use of shaped comb fingers is demonstrated, through the design, fabrication, and testing of tunable resonators which allow both up and down shifts of the resonant frequency. The simulation and testing results demonstrate the usefulness and accuracy of the simple model. Finally, other applications for shaped comb fingers are described, including tunable sensors, low-voltage actuators, multistable actuators, or actuators with linear voltagedisplacement behavior. [879] Index Terms-Tunable resonators, variable gap electrodes. I. INTRODUCTION T HE COMB-DRIVE actuator is one of the main building blocks of microelectromechanical systems (MEMS). Its working principle is based on an electrostatic force that is generated between biased interdigitated conductive combs. Because of its capability of force generation or varying capacitance, it finds wide application in micro-mechanical systems. Sample applications include polysilicon microgrippers [1], scanning probe devices [2], force-balanced accelerometers [3], actuation mechanisms for rotating devices [4], laterally oscillating gyroscopes [5], and radio frequency (RF) filters [6]. Consequently, any improvement to this basic actuator could have far-reaching effects.