Carbon Nanotubes as a Framework for High-Aspect-Ratio MEMS Fabrication

Hutchison, David; Morrill, Nicholas B; Aten, Quentin T.; Turner, B. E.; Jensen, Brian D.; Howell, Larry L.; Vanfleet, Richard; Davis, Robert C.

doi:10.1109/jmems.2009.2035639

Cited by 73 publications

(61 citation statements)

References 21 publications

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“…In the extreme case, nearly all void space between CNTs can be filled with a desired material, thereby forming solid walls patterned according to the existing CNT layout during growth. 24 The variable porosity of the CNT structures is controlled in part by the exposure time of these structures to the infiltration process. Figure 1f shows a representative carboninfiltrated CNT-MM (CNT is herein taken to mean "carbon-infiltrated CNT") with low-porosity sidewall surfaces.…”

Section: Resultsmentioning

confidence: 99%

“…24 AZ nLOF2020 photoresist was spun on at 2750 rpm for 60 s and soft baked at 110°C for 60 s. CNT-MM pore geometry and ARTICLE dimensions (diamond shape with nominal diagonal dimensions of 4.5 Â 9.0 μm) were defined on the wafer by photolithography, and hard baked at 110°C for 60 s. The photoresist was developed in a lightly agitated, AZ300MIF solution. A thin iron film (Fe, ∼7 nm) was thermally evaporated onto the wafer surface as a catalyst for CNT growth.…”

Section: Cnt-mm Fabrication Amentioning

confidence: 99%

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High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

et al. 2015

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The utility of unmanned micro underwater vehicles (MUVs) is paramount for exploring confined spaces, but their spatial agility is often impaired when maneuvers require burst-propulsion. Herein we develop highaspect ratio (150:1), multiwalled carbon nanotube microarray membranes (CNT-MMs) for propulsive, MUV thrust generation by the decomposition of hydrogen peroxide (H 2 O 2 ). The CNT-MMs are grown via chemical vapor deposition with diamond shaped pores (nominal diagonal dimensions of 4.5 × 9.0 μm) and subsequently decorated with urchin-like, platinum (Pt) nanoparticles via a facile, electroless, chemical deposition process. The Pt-CNT-MMs display robust, high catalytic ability with an effective activation energy of 26.96 kJ mol -1 capable of producing a thrust of 0.209 ± 0.049 N from 50% [w/w] H 2 O 2 decomposition within a compact reaction chamber of eight Pt-CNT-MMs in series. A n upward trend in the research and use of unmanned underwater vehicles (UUVs), and in particular micro underwater vehicles (MUVs, small UUVS between 1 and 50 cm in length), for exploration of confined spaces such as ship wrecks, submerged oil pipelines, and various military purposes has been observed over recent years. 1À3 The locomotion of these vehicles is typically controlled by propellerbased systems, which are often used for long-endurance missions. 4À6 However, propeller-based systems are usually limited in their ability to perform tight radius turns, burst-driven docking maneuvers, and lowspeed course corrections. ABSTRACT The utility of unmanned micro underwater vehicles (MUVs) is paramount for exploring confined spaces, but their spatial

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Section: Resultsmentioning

confidence: 99%

Section: Cnt-mm Fabrication Amentioning

confidence: 99%

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

et al. 2015

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“…A further attribute of the TiN underlayer is its electrical conductivity. In the future, electrical integration of strainengineered CNT structures in conjunction with the postprocessing methods described above could be useful in advanced microsystems, including as structural elements or microsensors 43,44 . Such applications could take advantage of the thermal and mechanical durability of CNTs, as well as the anisotropic properties arising from their alignment and collective curvature.…”

Section: Discussionmentioning

confidence: 99%

Strain-engineered manufacturing of freeform carbon nanotube microstructures

et al. 2014

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The skins of many plants and animals have intricate microscale surface features that give rise to properties such as directed water repellency and adhesion, camouflage, and resistance to fouling. However, engineered mimicry of these designs has been restrained by the limited capabilities of top-down fabrication processes. Here we demonstrate a new technique for scalable manufacturing of freeform microstructures via strain-engineered growth of aligned carbon nanotubes (CNTs). Offset patterning of the CNT growth catalyst is used to locally modulate the CNT growth rate. This causes the CNTs to collectively bend during growth, with exceptional uniformity over large areas. The final shape of the curved CNT microstructures can be designed via finite element modeling, and compound catalyst shapes produce microstructures with multidirectional curvature and unusual self-organized patterns. Conformal coating of the CNTs enables tuning of the mechanical properties independently from the microstructure geometry, representing a versatile principle for design and manufacturing of complex microstructured surfaces.

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“…In addition, because CI-CNT structures are fabricated through traditional microfabrication techniques, high resolution is achieved in compliant elements of the sensor, resulting in higher accuracy in sensing the expected accelerations. These structures also have very high aspect-ratios making them very robust as demonstrated by Fazio et al (2011) and Hutchison et al (2010).…”

Section: Introductionmentioning

confidence: 82%

“…The wafer preparation, nanotube growth, and infiltration processes that we used are similar to those described by Fazio et al (2011) and Hutchison et al (2010). An illustration of this process is given in Fig.…”

Section: Fabricationmentioning

confidence: 99%

Power-free bistable threshold accelerometer made from a carbon nanotube framework

Tanner

Jensen

2013

Mech. Sci.

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Abstract. This paper presents a design and a method for fabricating and testing fully compliant, bistable threshold accelerometers made from a carbon-infiltrated carbon nanotube framework. Two different configurations based on differences in compliant beam angles are presented. Both configurations were tested under constant accelerations produced by mounting them on a spinning disk and under impulse accelerations by mounting them to the end of a swinging pendulum with a stop at the lowest point of the pendulum path. Tests were also performed to observe the potential effects of stress relaxation in the carbon nanotube material. This was done by placing the accelerometers in their second stable position (nonfabricated position) and then testing them after a period of 24 h. Results show that in eight of the twelve tests there was no significant change due to stress relaxation. In the other four tests, the change was relatively small, especially when compared to stress relaxation effects in other materials such as plastics. Measurements indicate that the accelerometers show very high repeatability individually. However, we also observed that there is significant variation in switching acceleration between accelerometers with identical geometric parameters. This may be due to random variation occurring during the fabrication process.

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Carbon Nanotubes as a Framework for High-Aspect-Ratio MEMS Fabrication

Cited by 73 publications

References 21 publications

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

Strain-engineered manufacturing of freeform carbon nanotube microstructures

Power-free bistable threshold accelerometer made from a carbon nanotube framework

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Carbon Nanotubes as a Framework for High-Aspect-Ratio MEMS Fabrication

Cited by 73 publications

References 21 publications

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH2O2Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH2O2Decomposition

Strain-engineered manufacturing of freeform carbon nanotube microstructures

Power-free bistable threshold accelerometer made from a carbon nanotube framework

Contact Info

Product

Resources

About

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition