In this paper, a novel 2 × 2 MEMS optical switch is presented. The switch, which employs the proposed split cross-bar (SCB) design, intrinsically possesses advantages over typical 2 × 2 MEMS switches of traditional designs, such as the cross-bar design and the mirror-array design. In comparison to the cross-bar switches, the SCB switch does not have the constraint on the mirror thickness which affects fiber alignment significantly. In comparison to the mirror-array switches, the SCB switch requires fewer movable mirrors and thus gives better fabrication yield. The SCB device can be easily fabricated by employing inductively-coupled-plasma etching (ICP) on a silicon-on-insulator (SOI) wafer with one photo-mask. Electro-thermal V-beam actuators integrated with the bi-stable mechanisms are employed to move and latch the movable mirrors of the proposed device. The displacement of the movable mirrors is at least 60 µm under a driving voltage of 40 V. The optical performance and the dynamic response of the SCB switch are also investigated. The measured average insertion loss is less than −1.4 dB with a deviation of 0.08 dB. Also, the measured switching time is about 10 ms.
This work presents the development of a novel micromachined 2x2 optical switch monolithically integrated with variable optical attenuators. The proposed device can be easily realized by a standard manufacturing process with single photo mask. The key to realizing this device by such a simple approach is the employment the split-cross-bar (SCB) configuration. With this configuration, the fabrication challenges and layout constraints for accommodating all the sub-components of this dual-function device can be completely eliminated. The monolithically-integrated system has four movable mirrors, two bi-stable mechanisms and six actuators. The switching of optical signals is achieved by moving the mirrors attached on the bi-stable mechanisms using four of the actuators. The attenuation of optical power is carried out by moving the mirrors using the other two actuators and the bi-stable mechanisms. Also, only simple in-plane motions are needed for these sub-components to achieve all the functionalities. In addition, the adaption of bi-stable mechanisms can reduce the power consumption and simplify the actuation scheme. The measured insertion losses for both channels are about 1.0~1.1 dB, and the cross-talk is less than -60 dB. The attenuation range is about 30 dB for a maximum applied voltage of 20 V. Also, the measured switching time is less than 4 ms.
This paper presents the development of a 2x2 optical switch which consists of a MEMS-based silicon micro-mirror structure and two bi-stable solenoid-based actuators. The silicon micro-mirror structure is realized by using a proposed simple single-step anisotropic silicon etching process. Bi-stable solenoid-based actuators are designed and developed. The proposed device, which adapts the split-cross bar (SCB) design as the optical-path configuration, has many advantages such as low power consumption, easy fiber alignment, simple manufacturing process, and simple actuation scheme. The measured insertion loss of the device is about -0.9 ~ -1.1 dB. The long-term reliability test shows that the deviations of the insertion losses are less than 0.03 dB after 10,000 switching cycles. Also, the measured cross-talk is about -60 dB, and the measured switching time is less than 10 ms.
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