A Novel 4$\, \times \,$4 Optical Switch Using an Anisotropically Etched Micromirror Array and a Bistable Mini-Actuator Array

Yang, Yao‐Joe; Liao, Bo-Ting

doi:10.1109/lpt.2008.2009127

Cited by 6 publications

(1 citation statement)

References 15 publications

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“…Micromirrors realized by microelectromechanical system (MEMS) technologies have been widely used in many applications, such as projection displays [1,2], biomedical imaging systems [3,4], optical communications [5,6], maskless lithography [7], and so on [8,9]. Based on actuation methods, micromirror devices can be classified into two types: digital actuation and analog actuation.…”

Section: Introductionmentioning

confidence: 99%

A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling

Liao¹,

Yang²

2010

J. Micromech. Microeng.

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In this work, we develop a microelectromechanical digital-to-analog converter mirror module (M-DACMM) and demonstrate its application for non-contact optical surface profiling systems. The proposed device generates nano-scale step motions that are proportional to input digital signals. A fabrication process, which is capable of releasing a large-area movable mirror without etching holes, is proposed to realize the M-DACMM monolithically. The transient responses of the mirror module are also measured and discussed. The switching time between two input binary states is less than 80 ms. The measured full-scale displacement is 1050 nm, and the motion step is 72 nm. The M-DACMM is also successfully installed on a surface profiling system as a reference mirror module. The surface-profiling results measured by the system are also presented.

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Section: Introductionmentioning

confidence: 99%

A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling

Liao¹,

Yang²

2010

J. Micromech. Microeng.

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Analysis on skin-effect of a polymer shielded push–pull directional coupler electro-optic switch

Zheng

Yan

et al. 2009

Appl. Phys. B

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Collective evolution of submicron hillocks during the early stages of anisotropic alkaline wet chemical etching of Si(1 0 0) surfaces

Sana

Vázquez

Cuerno

et al. 2017

J. Phys. D: Appl. Phys.

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We address experimentally the large-scale dynamics of Si (100) surfaces during the initial stages of anisotropic wet (KOH) chemical etching, which are characterized through atomic force microscopy. These systems are known to lead to the formation of characteristic pyramids, or hillocks, of typical sizes in the nanometric/micrometer scales, thus with potential for the large number of applications that can benefit from nanotexturing of Si surfaces. The present pattern formation process is very strongly disordered in space. We assess the space correlations in such type of rough surfaces and elucidate the existence of a complex and rich morphological evolution, featuring at least three different regimes in just 10 minutes of etching. Such a complex time behavior cannot be consistently explained within a single formalism for dynamic scaling. The pyramidal structure reveals itself as the basic morphological motif of the surface throughout the dynamics. A detailed analysis of the surface slope distribution with etching time reveals that the texturing process induced by the KOH etching is rather gradual and progressive, which accounts for the dynamic complexity. The various stages of the morphological evolution can be accurately reproduced by computer-generated surfaces composed by uncorrelated pyramidal structures. To reach such an agreement, the key parameters are the average pyramid size, which increases with etching time, its distribution, and the surface coverage by the pyramidal structures.

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A Novel 4$\, \times \,$4 Optical Switch Using an Anisotropically Etched Micromirror Array and a Bistable Mini-Actuator Array

Cited by 6 publications

References 15 publications

A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling

A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling

Analysis on skin-effect of a polymer shielded push–pull directional coupler electro-optic switch

Collective evolution of submicron hillocks during the early stages of anisotropic alkaline wet chemical etching of Si(1 0 0) surfaces

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