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Polycrystalline silicon (poly-Si) thin films have been prepared by electron-beam evaporation and thermal annealing for the development of thin-film solar cells on glass coated with ZnO:Al as a transparent, conductive layer. The poly-Si microstructure and photovoltaic performance were investigated as functions of the deposition temperature by Raman spectroscopy, scanning and transmission electron microscopies including defect analysis, x-ray diffraction, external quantum efficiency, and open circuit measurements. It is found that two temperature regimes can be distinguished: Poly-Si films fabricated by deposition at low temperatures (Tdep<400 °C) and a subsequent thermal solid phase crystallization step exhibit 1–3 μm large, randomly oriented grains, but a quite poor photovoltaic performance. However, silicon films deposited at higher temperatures (Tdep>400 °C) directly in crystalline phase reveal columnar, up to 300 nm big crystals with a strong ⟨110⟩ orientation and much better solar cell parameters. It can be concluded from the results that the electrical quality of the material, reflected by the open circuit voltage of the solar cell, only marginally depends on crystal size and shape but rather on the intragrain properties of the material. The carrier collection, described by the short circuit current of the cell, seems to be positively influenced by preferential ⟨110⟩ orientation of the grains. The correlation between experimental, microstructural, and photovoltaic parameters will be discussed in detail.

Hydrogen passivation (HP) of polycrystalline silicon (poly‐Si) thin film solar cells was performed in a parallel plate radio‐frequency (rf) plasma setup. The influence of hydrogen pressure p and electrode gap d on breakdown voltage Vbrk is presented showing that the minimum in Vbrk shifts with higher pressures towards higher p · d values. Cell test structures provided by CSG Solar AG were used to examine the influence of p and d on the open circuit voltage VOC. The highest VOC's were achieved for p · d values that correspond to a minimum in Vbrk. HP strongly improved the VOC. After the hydrogen plasma treatment the VOC improved significantly by a factor of 2 and amounted to 450 mV. Optimized parameters were then applied to different poly‐Si solar cells prepared by electron beam evaporation.

Employing quantitative electron-paramagnetic resonance analysis and numerical simulations, we investigate the performance of thin-film polycrystalline silicon solar cells as a function of defect density. We find that the open-circuit voltage is correlated to the density of defects, which we assign to coordination defects at grain boundaries and in dislocation cores. Numerical device simulations confirm the observed correlation and indicate that the device performance is limited by deep defects in the absorber bulk. Analyzing the defect density as a function of grain size indicates a high concentration of intra-grain defects. For large grains (>2 lm), we find that intra-grain defects dominate over grain boundary defects and limit the solar cell performance.

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