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We design and fabricate an efficient broadband grating coupler on a 400 nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310 nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58 nm and -27 dB, respectively.

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A monolithically integrated eight-channel optical multiplexer (Mux) with a 400 GHz channel spacing ~1550 nm is presented based on a silicon-on-insulator rib waveguide and an asymmetric Mach-Zehnder interferometer. All channels were optimized independently with integrated heaters. The fully tuned Mux shows an adjacent channel isolation of ~13 dB, an excess loss of ~2.6 dB, and a channel uniformity of ~1.5 dB over a 25 nm wavelength span. In addition, the phase tuning efficiency for different interlevel dielectric layer thicknesses and thermal crosstalk were investigated.

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