Modern microelectronic systems and applications demand an every increasing amount of non‐volatile memories that are fast, reliable, and consume little power. Memory concepts based on ferroelectric HfO2 like the ferroelectric field effect transistor (FeFET) and the ferroelectric random access memory (FeRAM) are promising to satisfy these requirements. As a consequence, continuing high attention is given to improve the ferroelectric properties and the reliability characteristics of the ferroelectric HfO2 films –‐ for instance by using different dopant elements, dopant concentrations, and film thicknesses. Superlattices (i.e., a periodic structure of two materials stacked upon each other) are a promising alternative approach. Herein, [HfO2/ZrO2] superlattices of various sublayer thicknesses and a constant total thickness of 10 nm are embedded into metal‐ferroelectric‐metal (MFM) capacitors and then electrically as well as structurally characterized with special focus on remanent polarization, coercive field, endurance, and high temperature reliability. Compared to a 10 nm (Hf,Zr)O2 solid solution reference film, the use of superlattice stacks significantly improves the above mentioned parameters. In addition, most of these parameters depend on the sublayer thickness, which allows, for instance, tailoring the coercive field of the whole device.
Due to its ferroelectricity, hafnium oxide has attracted a lot of attention for ferroelectric memory devices. Amongst different dopant elements, zirconium is found to be beneficial due to the relatively low crystallization temperature of hafnium‐zirconium‐oxide (HZO), thus it is back‐end‐of‐line (BEoL) compatible. The thickness of HZO has a significant impact on ferroelectric device reliability. High operation temperatures and high endurance are important criteria depending on the application. Herein, various HZO thicknesses (7, 8, and 10 nm) in MFM (metal‐ferroelectric‐metal) capacitors are investigated at varying operation temperatures (25 to 175 °C) at varying electric fields (±3 to ±5.4 MV cm−1) with respect to polarization, leakage current, endurance, and retention. 7 nm HZO showed promising results with an endurance of 107 cycles, with a low leakage current density, and almost no retention loss after 10 years. Extrapolated results at operation conditions (±2 MV cm−1 and 10 MHz) showed an endurance of 1010 cycles.
We present the design, development, and evaluation of HREyes: biomimetic communication devices which use light to communicate information and, for the first time, gaze direction from AUVs to humans. First, we introduce two types of information displays using the HREye devices: active lucemes and ocular lucemes. Active lucemes communicate information explicitly through animations, while ocular lucemes communicate gaze direction implicitly by mimicking human eyes. We present a human study in which our system is compared to the use of an embedded digital display that explicitly communicates information to a diver by displaying text. Our results demonstrate accurate recognition of active lucemes for trained interactants, limited intuitive understanding of these lucemes for untrained interactants, and relatively accurate perception of gaze direction for all interactants. The results on active luceme recognition demonstrate more accurate recognition than previous light-based communication systems for AUVs (albeit with different phrase sets). Additionally, the ocular lucemes we introduce in this work represent the first method for communicating gaze direction from an AUV, a critical aspect of nonverbal communication used in collaborative work. With readily available hardware as well as open-source and easily re-configurable programming, HREyes can be easily integrated into any AUV with the physical space for the devices and used to communicate effectively with divers in any underwater environment with appropriate visibility.
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