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Zr-Ti-Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 degrees C in vacuum and 830 degrees C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr-Ti-Si-N-ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 degrees C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (beta-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Formation of the latter did not result in decay of solid solution (Zr, Ti)N but increased in it a specific content of Ti-component. Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25 nm after annealing temperature reached 1180 degrees C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%. Under 530 degrees C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and alpha-Si3N4 were formed, average hardness increased to 40.8 +/- 4 GPa. Annealing to 500 degrees C increased hardness and demonstrated lower spread in values H = 48 +/- 6 GPa and E = (456 +/- 78) GPa. Zr-Ti-Si-N coatings has high wear resistance and low friction coefficient in comparison at a temperature of 500 degrees C possess with coatings TiN, Ti-Si-N.

In the present work, multifunctional Ti-SiN coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-SiN were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10 17 ions/cm 2 and energy E = 60 keV. The results demonstrated that ion implantation has an effect on the grain size, hardness, and Young modulus of the Ti-SiN coating. Additionally, the effect of Cu implantation on the bioactive properties of coatings was investigated by contact antimicrobial essay. The results show a high release of Cu ions in the cultivation liquid and the low efficiency of the b20% Cu doping towards E. coli bacteria. Our results bring understanding to the low dosage ion implantation of multifunctional surfaces towards applications and general drawbacks of ion implantation as bioactive tailoring method.