2016
DOI: 10.1016/j.matdes.2016.08.050
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Effect of ion implantation on the physical and mechanical properties of Ti-Si-N multifunctional coatings for biomedical applications

Abstract: In the present work, multifunctional Ti-SiN coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-SiN were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10 17 ions/cm 2 and energy E = 60 keV. The results demonstrated that ion implantation has an effect on the grain size, hardness, and Young modulus of the Ti-SiN coating. Additionally, the effect of Cu implantation on the bioactive … Show more

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Cited by 74 publications
(23 citation statements)
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“…Loadings ( increase in shift of the substrate (fro tively. Besides, it should be noted t ness, and are steadier [12,13]. Nitri sion strength show high values of ha 2 and 3, it is possible to see that cov…”
Section: T a B L E 2 Mean Values Of Hardness Of Nitride Coveringsmentioning
confidence: 82%
“…Loadings ( increase in shift of the substrate (fro tively. Besides, it should be noted t ness, and are steadier [12,13]. Nitri sion strength show high values of ha 2 and 3, it is possible to see that cov…”
Section: T a B L E 2 Mean Values Of Hardness Of Nitride Coveringsmentioning
confidence: 82%
“…The loads (L C5 ) for the (Zr-TiCr-Nb)N and (Zr-Ti-Cr-Nb-Si)N coatings increase with increasing substrate bias (from −100 to −200 V) their maxima of 62.06 and 45.57 N, respectively. In addition, it should be noted, that coatings, obtained under high bias, possessing the higher hardness are more resistant [53][54][55][56][57]. Nitride coatings (Zr-Ti-Cr-Nb)N and (Zr-Ti-Cr-NbSi)N with good adhesion strength demonstrate high values of hardness, 43.9 and 27.5 GPa, respectively.…”
Section: Tribological Properties Of Nitride Films Deposited Under Difmentioning
confidence: 99%
“…Low thermal stability and oxidation resistance are among the main disadvantages of such coatings. Addition of impurities to the crystal lattice of the transition metal nitrides form nanostructured coatings with improved properties [25][26][27][28][29][30][31][32]. Ternary nitrides, such as Ti 1-x Al x N, Zr 1-x Al x N and Cr 1-x Al x N have higher hardness, oxidation resistance and thermal stability in comparison with binary CrN, ZrN and TiN coatings [33][34][35][36][37][38][39][40][41][42][43].…”
Section: Accepted Manuscript Intrmentioning
confidence: 99%