2010
DOI: 10.1002/9780470944042.ch14
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Phase Composition, Thermal Stability, Physical and Mechanical Properties of Superhard on Base Zr‐Ti‐Si‐N Nanocomposite Coatings

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Cited by 40 publications
(22 citation statements)
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“…While nitrides of single elements are studied well enough, their multilayer modifications need study that is more detailed [26][27][28][29][30][31][32][33][34][35]. Therefore, the study of features of structure, elemental and phase composition of multilayer coatings depending on the deposition conditions is an important task in solid-state physics and materials science [36][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51].…”
Section: Introductionmentioning
confidence: 99%
“…While nitrides of single elements are studied well enough, their multilayer modifications need study that is more detailed [26][27][28][29][30][31][32][33][34][35]. Therefore, the study of features of structure, elemental and phase composition of multilayer coatings depending on the deposition conditions is an important task in solid-state physics and materials science [36][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51].…”
Section: Introductionmentioning
confidence: 99%
“…A cathode-arc-vacuum-evaporation Bulat-6 with HF generator [3,5] was applied. Potential bias was applied to the substrate from the HF generator of pulsed damped oscillations with a frequency of < 1 MHz.…”
Section: Methodsmentioning
confidence: 99%
“…Recently various methods of the surface modification have found a wide application: physicochemical (e.g., carbonitriding [7], nitriding [8]), ion-plasma (vacuum-arc evaporation [2], magnetron sputtering [3], and ion plasma deposition [4][5]) as well as laser and electron beam machining, including pulse, machining by powerful ion beam and deposition of coatings by ablation [1,6,8,9], treatment by a plasma jet with a flash ing [8,10], etc. All the above methods of the treatment and deposition of protective coatings have their advan tages and disadvantages, as it follows from the analysis of publications [10][11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%