Zirconia thin film preparation by wet chemical methods at low temperature

Popovici, Mihaela; Graaf, J. de; Verschuuren, Marc A.; Graat, P. C. J.; Verheijen, Marcel A.

doi:10.1016/j.tsf.2010.08.015

Cited by 15 publications

(6 citation statements)

References 36 publications

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“…For example, response of static dielectric, e r , is much higher for t-ZrO 2 and c-ZrO 2 than that for m-ZrO 2 (e r(t) = 38; e r(c) = 37 and e r(m) = 20) [14]. Here, t-ZrO 2 is emphasized as it offers superior strength, wear resistance, fracture toughness, higher surface hardness and smoothness, and catalytic properties over m-ZrO 2 [15,16]. ZrO 2 is usually related with high temperature applications due to its high thermal and chemical stability.…”

Section: Introductionmentioning

confidence: 94%

Design of hierarchically meso–macroporous tetragonal ZrO2 thin films with tunable thickness by spin-coating via sol–gel template route

Soo

Kawamura

Muto

et al. 2013

Microporous and Mesoporous Materials

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Section: Introductionmentioning

confidence: 94%

Design of hierarchically meso–macroporous tetragonal ZrO2 thin films with tunable thickness by spin-coating via sol–gel template route

Soo

Kawamura

Muto

et al. 2013

Microporous and Mesoporous Materials

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“…As shown in Figure 8, the refractive index decreased when the higher molar ratio of ethanol to Zr[O(CH 2 ) 3 CH 3 ] 4 was used. This was caused by the reduction of the ZrO 2 film thickness, which affected the interaction of light with the ZrO 2 films, increasing the transmittance while reducing the refractive index [43]. Coarsening of the films with higher porosity after HWT also caused the refraction index to decrease when molar ratios of ethanol of 20 tained ZrO2 films exhibited high transmittance properties (higher than 80%) for the annealed samples (both before and after HWT).…”

Section: Hwt Of Zirconium Oxide Sol-gel Derived Coatingsmentioning

confidence: 99%

Nanomaterial Fabrication through the Modification of Sol–Gel Derived Coatings

et al. 2021

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In materials processing, the sol–gel method is one of the techniques that has enabled large-scale production at low cost in the past few decades. The versatility of the method has been proven as the fabrication of various materials ranging from metallic, inorganic, organic, and hybrid has been reported. In this review, a brief introduction of the sol–gel technique is provided and followed by a discussion of the significance of this method for materials processing and development leading to the creation of novel materials through sol–gel derived coatings. The controlled modification of sol–gel derived coatings and their respective applications are also described. Finally, current development and the outlook of the sol–gel method for the design and fabrication of nanomaterials in various fields are described. The emphasis is on the significant potential of the sol–gel method for the development of new, emerging technologies.

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“…Hybrid organicinorganic materials are promising candidates for the fabrication of high refractive index materials with good optical quality because they offer the possibility to combine the high refractive index of bulk metal oxide with the low temperature sol-gel process of organic compounds. Recent work on the development of hybrid organic-inorganic coatings of metal oxides such as TiO 2 [9][10] and ZrO 2 [11][12], have reported an increase in the refractive index of hybrid sol-gel materials. Metal oxides are particularly interesting because of the high refractive index of the bulk material (in the range of 2.13 and 2.2 for zirconium oxide).…”

Section: Introductionmentioning

confidence: 99%

“…These metal oxides are often transparent in the visible range which makes them advantageous for optical devices requiring high refractive index and high transparency. A sol-gel process incorporating zirconium alkoxide has been recently proposed for the preparation of ZrO 2 thin films [12][13]. However most of the ZrO 2 thin films were obtained at high temperature (> 400°C) [12][13].…”

Section: Introductionmentioning

confidence: 99%

“…A sol-gel process incorporating zirconium alkoxide has been recently proposed for the preparation of ZrO 2 thin films [12][13]. However most of the ZrO 2 thin films were obtained at high temperature (> 400°C) [12][13]. In our previous investigation [14], organically modified silicon based polymers have been prepared from a formulation employing a chelating agent and organosilane precursors.…”

Section: Introductionmentioning

confidence: 99%

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Hybrid zirconium sol-gel thin films with high refractive index

Gorin

Copperwhite

Elmaghrum

et al. 2011

International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies

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We describe the synthesis of optical quality thin film materials with high refractive index, employing zirconium based hybrid sol-gel precursors. As the zirconium propoxide precursor is unstable in the presence of a strong nucleophilic agent such as water, two synthesis routes have been performed employing a chelating agent and an organosilane precursor to avoid the formation of any undesired ZrO 2 agglomerates, leading to organo-zirconate complexes and silicato-zirconate copolymers, respectively. The prepared hybrid sol-gel materials were deposited by spin-coating to form a transparent thin film on silicon substrates, and heat treated at 100 °C for the final stabilisation of the layer. The effect of the two synthesis routes on the optical properties of zirconium based hybrid sol-gel material is discussed. It was found that the nature and concentration of the organosilane precursor can significantly affect the structural properties of the deposited films. A correlation was also demonstrated between the concentration of the organosilane precursor and the refractive index of the material. By reducing the concentration of organosilane precursor, high refractive index materials were obtained. Similar behaviour was observed for the materials synthesised via chelating agent. The synthesis employing an organosilane precursor produces films with higher refractive index. A maximum refractive index of 1.746 was measured at 635nm for the deposited thin films.

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Zirconia thin film preparation by wet chemical methods at low temperature

Cited by 15 publications

References 36 publications

Design of hierarchically meso–macroporous tetragonal ZrO2 thin films with tunable thickness by spin-coating via sol–gel template route

Design of hierarchically meso–macroporous tetragonal ZrO2 thin films with tunable thickness by spin-coating via sol–gel template route

Nanomaterial Fabrication through the Modification of Sol–Gel Derived Coatings

Hybrid zirconium sol-gel thin films with high refractive index

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