This paper presents work aimed at optimizing the fabrication of silicon nitride Si(x)N(y) thin-film visible-light planar waveguides using plasma-enhanced chemical vapour deposition (PECVD). The effects of plasma frequency, precursor gas ratio, and thermal annealing in relation to waveguide optical properties (refractive index, propagation losses) are studied. Experimental results over a wide range of precursor gas ratios show convincingly that waveguides fabricated using low-frequency PECVD have lower propagation losses in the visible range compared to waveguides of equal refractive index fabricated with high-frequency PECVD.
a b s t r a c tThis study reports on the first development of high refractive index thin film materials processed at temperatures not greater than 100°C. Three materials were synthesised by the sol-gel technique, each employing different transition metal precursors (niobium, tantalum and vanadium alkoxides). The optical properties of these materials were characterised by ellipsometry and the propagation losses at 638 nm were measured by the prism coupling method. It is shown that refractive indices as high as 1.870, 2.039 and 2.308 are obtained from niobium-, tantalum-and vanadium-based materials respectively, attributed to the influence of the transition metal atomic size on the condensation reactions.
This work reports for the first time the development of enhanced conductivity, graphenedoped photo-patternable hybrid organic-inorganic ionogels and the effect of the subsequent materials condensation on the conductivity and mechanical stability of threedimensional microstructures fabricated by multi-photon polymerisation (MPP). Ionogels were based on photocurable silicon/zirconium hybrid sol-gel materials and phosphonium (trihexyltetradecylphosphonium dicyanamide [P6,6,6,14][DCA] ionic liquid (IL). To optimise the dispersion of graphene within the ionogel matrices, aqueous solutions of graphene were prepared, as opposed to the conventional graphene powder approach, and employed as catalysts of hydrolysis and condensation reactions occurring in the sol-gel process.Ionogels were prepared via a two step process by varying the hydrolysis degree from 25 to 50%, IL content between 0-50 w/w%, and the inorganic modifier (zirconate complex) concentration from 30 to 60 mol.% against the photocurable ormosil and they were characterised via Raman, Electrochemical Impedance Spectroscopy and Transmission Electron Microscopy. MPP was performed on the hybrid ionogels, resulting in threedimensional microstructures that were characterised using scanning electron microscopy.It is clearly demonstrated that the molecular formulation of the ionogels, including the concentration of graphene and the zirconate network modifier, play a critical role in the conductivity of the ionogels and influence the resulting mechanical stability of the fabricated three-dimensional microstructures. This work aims to establish for the first time the relationship between the molecular design and condensation of materials in the physico-chemistry and dynamic of ionogels.3
We report on the super enhancement of the 1.54 μm Er emission in erbium doped silicon-on-insulator when codoped with oxygen at a ratio of 1:1. This is attributed to a more favourable crystal field splitting in the substitutional tetrahedral site favoured for the singly coordinated case. The results on these carefully matched implant profiles show that optical response is highly determined by the amount and ratio of erbium and oxygen present in the sample and ratios of O:Er greater than unity are severely detrimental to the Er emission. The most efficient luminescence is forty times higher than in silicon-on-insulator implanted with Er only. This super enhancement now offers a realistic route not only for optical communication applications but also for the implementation of silicon photonic integrated circuits for sensing, biomedical instrumentation and quantum communication.
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