Zero power consumption visual curvature sensor by flexible interferometer

Lo, Cheng‐Yao; Huang, Yi-Ren; Liao, Kuan-Shun; Kuo, Sheng-An; Wei, Sung-Yen

doi:10.1016/j.sna.2011.03.026

Cited by 8 publications

(12 citation statements)

References 14 publications

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“…The maximum displacement of both the layers in turn influenced the contact area size. Compared to previous work done by gravure printing [ 7 ] with thinner spacer ( e = 600 nm), this work ( e = 3 μm) showed a reasonable curvature sensitivity (slope) trend, which satisfied the prediction of the model. The similarity between previous and this work was proved from the interpolation of both data sets listed on Table 2 .…”

Section: Resultssupporting

confidence: 78%

“…The UV resin provided for an easier bonding process on a nanometer thickness scale compared to other studies, in which additional complicated processes such as plasma treatment [ 21 ], chemical treatment [ 22 ], and thermal reflow [ 23 ] were employed. Compared to the work done with gravure printing [ 7 ], this inkjet printing process provided controllable layer thickness and the possibility of precise positioning.…”

Section: Resultsmentioning

confidence: 99%

“…Inkjet printing is also one of the printing processes applicable to replace conventional photolithography processes for special applications such as flexible electronics [ 12 , 13 ], polymer electronics [ 14 , 15 ] and organic electronics [ 16 , 17 ] when resolution is not a concern. The process for the spacer layer in Figure 1(a) played an important role because the sensitivity of this 3DS sensing patch depends on not only the lateral dimension mentioned above, but also the vertical spacing (spacer height, e ) [ 7 ] as indicated in Equation (8) . The process flow, which combined the photolithography and the inkjet printing process, is illustrated in Figure 4 .…”

Section: Processmentioning

confidence: 99%

“…We previously proposed a curvature sensor [ 7 ] with unique characteristics such as distant sensing and zero-power consumption which was based on the microelectromechanical system (MEMS)-controlled Fabry-Pérot color interferometer [ 8 ]. The previous work was done partially by roll-to-roll printing techniques which cannot precisely control the printed thickness of the cavity of the interferometer, which in turn led to a specific but limited operation range.…”

Section: Introductionmentioning

confidence: 99%

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A High Sensitivity Three-Dimensional-Shape Sensing Patch Prepared by Lithography and Inkjet Printing

Huang

Kuo

Stach

et al. 2012

Sensors

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A process combining conventional photolithography and a novel inkjet printing method for the manufacture of high sensitivity three-dimensional-shape (3DS) sensing patches was proposed and demonstrated. The supporting curvature ranges from 1.41 to 6.24 × 10−2 mm−1 and the sensing patch has a thickness of less than 130 μm and 20 × 20 mm2 dimensions. A complete finite element method (FEM) model with simulation results was calculated and performed based on the buckling of columns and the deflection equation. The results show high compatibility of the drop-on-demand (DOD) inkjet printing with photolithography and the interferometer design also supports bi-directional detection of deformation. The 3DS sensing patch can be operated remotely without any power consumption. It provides a novel and alternative option compared with other optical curvature sensors.

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Section: Resultssupporting

confidence: 78%

Section: Resultsmentioning

confidence: 99%

Section: Processmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A High Sensitivity Three-Dimensional-Shape Sensing Patch Prepared by Lithography and Inkjet Printing

Huang

Kuo

Stach

et al. 2012

Sensors

Self Cite

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“…Because strains generated in the micrometer range are difficult to visualize in real-time using the bare eyes, they must be detected based on physical quantities read out by humans or automatic systems. Light-based optical strain detection solutions usually take advantage of unique optical effects, such as the Fabry-Pérot interference [ 1 , 2 ], the Moiré effect [ 3 , 4 ], Bragg diffraction [ 5 , 6 ], or pattern recognition [ 7 ], to visualize strain with visible colors or non-visible signals. In the same time, sound waves are also used to monitor the density of materials, which in turn reflect strains embedded inside.…”

Section: Introductionmentioning

confidence: 99%

Thermoresistive Strain Sensor and Positioning Method for Roll-to-Roll Processes

Liao

2014

Sensors

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This study uses the Joule heating effect-generated temperature difference to monitor in real-time and localize both compressive and tensile strains for the polymer substrates used in the roll-to-roll process. A serpentine gold (Au) line was patterned on a polyethylenenaphthalate (PEN) substrate to form the strain sensor based on thermoresistive behavior. This strain sensor was then subjected to either current or voltage to induce the Joule heating effect on the Au resistor. An infrared (IR) detector was used to monitor the strain-induced temperature difference on the Au and PEN surfaces and the minimal detectable bending radius was 0.9 mm with a gauge factor (GF) of 1.46. The proposed design eliminates the judgment ambiguity from conventional resistive strain sensors where resistance is the only physical quantity monitored. This study precisely and successfully indicated the local strain quantitatively and qualitatively with complete simulations and measurements.

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Strain Visualization in Flexible Sensors with Functional Materials: A Review

Pancham

Chiu

Mukherjee

et al. 2023

Adv Materials Inter

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Here, in comparison to indirect and nonvisualizable detections that usually convert strains from electrical signals, the strain sensors that show visible signals with operation simplicity and intuitive perception for practical applications in flexible, printed, and hybrid microelectronics are summarized. The sensors are categorized into four mechanisms of optical phenomena (diffraction, reflection, interference, and photonic crystal), fluorescent mapping (mechanochromism and mechanoluminescence), Moiré effect, and thermal imaging. In addition to their operating principles, three characteristics of sensitivity, dynamic window, and spatial resolution are examined. Furthermore, three types of strains (uniaxial, biaxial, and multiaxial) with subcategories in strain mode (tensile and compressive) and uniformity (isotropic and anisotropic) that are supported by corresponding sensors are also summarized here. With three potential applications and markets of healthcare and biomedical engineering, human motion detection (sports science), and roll‐to‐roll manufacturing listed at the end, a steppingstone is offered here for those who works or intends to work in this field by revisiting the outcomes from key literature published in recent years.

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Zero power consumption visual curvature sensor by flexible interferometer

Cited by 8 publications

References 14 publications

A High Sensitivity Three-Dimensional-Shape Sensing Patch Prepared by Lithography and Inkjet Printing

A High Sensitivity Three-Dimensional-Shape Sensing Patch Prepared by Lithography and Inkjet Printing

Thermoresistive Strain Sensor and Positioning Method for Roll-to-Roll Processes

Strain Visualization in Flexible Sensors with Functional Materials: A Review

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