“…A variety of ZMW fabrication techniques have been reported, including deep UV photolithography [ 69 ], electron beam lithography [ 14 , 18 , 26 , 69 ], colloidal lithography [ 70 ], and focused ion beam (FIB) milling with gallium ions [ 25 , 29 , 71 , 72 ]. Each of these techniques has advantages and disadvantages.…”