Zernike phase-contrast full-field transmission X-ray nanotomography for 400 micrometre-sized samples

Abstract

Full-field X-ray nanotomography based on a Fresnel zone plate offers a promising and intuitive approach to acquire high-quality phase-contrast images with a spatial resolution of tens of nanometres, and is applicable to both synchrotron radiation and laboratory sources. However, its small field of view (FOV) of tens of micrometres provides limited volume information, which primarily limits its application fields. This work proposes a method for expanding the FOV as the diameter of the objective zone plate, which provides a 400 µm FOV at below 500 nm resolution with Zernike phase contrast. General applications of large-volume nanotomography are demonstrated in integrated circuit microchips and Artemia cysts. This method can be useful for imaging/analyzing industrial and biological samples where bulk properties are important or the sample is difficult to section.

Synchrotron radiation based X-ray techniques for analysis of cathodes in Li rechargeable batteries

“…X-ray imaging is well established to quantify the deformation of a single secondary particle, and its detailed investigation is discussed by Liu et al for NCM cathode. 230,231 Experimental procedure and tomographic images obtained for LiNi 0.8 Co 0.1 Mn 0.1 O 2 cathode are shown in Fig. 14a (Section S3†).…”

Principles of Different X-ray Phase-Contrast Imaging: A Review

“…Additionally, in 2020, Park et al skipped the condenser, used a collimated beam to illuminate the sample, and employed a beam stopper to block the zeroth-order harmonic of the objective. This setup successfully enlarged the field of view (FOV) to 400 µm at a resolution below 500 nm [28]. Their experiment was performed with a synchrotron source; it can also be applied to laboratory sources owing to its simplicity [28].…”

“…This setup successfully enlarged the field of view (FOV) to 400 µm at a resolution below 500 nm [28]. Their experiment was performed with a synchrotron source; it can also be applied to laboratory sources owing to its simplicity [28].…”

A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Reconstructions

“…Over the past two decades, the coherent nature of synchrotron radiation was exploited with the development of ptychography, a technique of stepping the beam over overlapping circular regions of the sample and allowing the radiation to propagate to the far field 6 . The last few years have seen application to integrated circuit interconnects with increasing sophistication [7][8][9][10][11] .…”