Abstract:We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x rays in a 100 nm spot and energy-resolving x-ray detectors that minimize
backgrounds and hold promise for identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on t… Show more
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