Zeptogram-Scale Nanomechanical Mass Sensing

Yang, Yi; Callegari, Carlo; Feng, Philip X.‐L.; Ekinci, K. L.; Roukes, M. L.

doi:10.1021/nl052134m

Cited by 969 publications

(713 citation statements)

References 16 publications

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“…As shown in figure 4, a large SNR of around 100 dB can be obtained with our device. This value is larger than data reported previously (see [1,10] for example). To measure the noise, we followed the technique described in [18].…”

Section: Noise and The Signal To Noise Ratiocontrasting

confidence: 68%

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In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

et al. 2010

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We report an actuation/detection scheme with a top-down nanoelectromechanical system (NEMS) for frequency shift based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-plane motion transduction. The process fabrication is fully CMOS (complementary metal-oxide-semiconductor) compatible. The results show a very large dynamic range of more than 100 dB and an unprecedented signal to background ratio of 69 dB providing an improvement of two orders of magnitude in the detection efficiency presented in the state of the art in NEMS fields. Such a dynamic range results from both negligible 1/ f noise and very low Johnson noise compared to the thermomechanical noise. This simple low power detection scheme paves the way for new class of robust mass resonant sensors.

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Section: Noise and The Signal To Noise Ratiocontrasting

confidence: 68%

“…Recently, mass resolution down to 7 zg Hz −1/2 [1] has been demonstrated using a metallic gauge layer deposited on the top of a cantilever. Another approach [14] consists in using a doped silicon nanowire that produces a second-order piezoresistive effect for large displacements of the nanowire.…”

Section: Introductionmentioning

confidence: 99%

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

et al. 2010

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“…Their small size, extremely low power consumption, and ultrafast operational speed are among the virtues that have been exploited for significant applications ranging from single-electron spin detection [1] and Zeptogram scale mass sensing [2] to rf communications [3], semiconductor superlattice [4,5], and many others [6][7][8][9][10][11][12][13][14]. From the perspective of basic science, NEM systems represent a novel class of high-dimensional nonlinear dynamical systems.…”

Section: Introductionmentioning

confidence: 99%

“…To see why NEM systems are fundamentally nonlinear and thus chaos can arise, we take as an example an electrostatically driven nanowire [1,2,8,9,[12][13][14][20][21][22], a paradigm for investigating nonlinear behaviors in nanoscale systems [15,18,19]. When the nanowire moves, the amount of stretching can be expressed as an integral of nonlinear functions of the displacements (see Sec.…”

Section: Introductionmentioning

confidence: 99%

Regularization of chaos by noise in electrically driven nanowire systems

Hessari

Lai

et al. 2014

Phys. Rev. B

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The electrically driven nanowire systems are of great importance to nanoscience and engineering. Due to strong nonlinearity, chaos can arise, but in many applications it is desirable to suppress chaos. The intrinsically high-dimensional nature of the system prevents application of the conventional method of controlling chaos. Remarkably, we find that the phenomenon of coherence resonance, which has been well documented but for low-dimensional chaotic systems, can occur in the nanowire system that mathematically is described by two coupled nonlinear partial differential equations, subject to periodic driving and noise. Especially, we find that, when the nanowire is in either the weakly chaotic or the extensively chaotic regime, an optimal level of noise can significantly enhance the regularity of the oscillations. This result is robust because it holds regardless of whether noise is white or colored, and of whether the stochastic drivings in the two independent directions transverse to the nanowire are correlated or independent of each other. Noise can thus regularize chaotic oscillations through the mechanism of coherence resonance in the nanowire system. More generally, we posit that noise can provide a practical way to harness chaos in nanoscale systems.

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“…Due to its low mass density and extraordinary mechanical properties, graphene is an ideal nanomaterial for nanoelectromechanical systems (NEMS), e.g., for extremely small mass sensing. 3,4 In fact, understanding basic properties of graphene plays a critical role in improving the performance of nano-electromechanical devices. Accurate measurements of these parameters are essential to model the performance of NEMS devices.…”

mentioning

confidence: 99%

Weighing graphene with QCM to monitor interfacial mass changes

Kakenov

Balcı

Salihoglu

et al. 2016

Applied Physics Letters

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In this Letter, using quartz crystal microbalance (QCM), we experimentally determined the mass density of graphene grown by chemical vapor deposition method. We developed a transfer printing technique to integrate large area single-layer graphene on QCM. By monitoring the resonant frequency of an oscillating quartz crystal loaded with graphene, we were able to measure the mass density of graphene as ~118 ng/cm 2 , which is significantly larger than the ideal graphene (~76 ng/cm 2 ) mainly due to the presence of wrinkles and organic/inorganic residues on graphene sheets.High sensitivity of quartz crystal resonator allowed us to determine the number of graphene layers in samples. (The technique is very sensitive and able to determine the number of graphene layers in a particular sample.) Besides, we extended our technique to probe interfacial mass variation during adsorption of biomolecules on graphene surface, and plasma-assisted oxidation of graphene.(Besides, we extended our technique to probe interfacial mass variation during adsorption of biomolecules on graphene surface, and plasma-assisted oxidation of graphene.

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Zeptogram-Scale Nanomechanical Mass Sensing

Cited by 969 publications

References 16 publications

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

Regularization of chaos by noise in electrically driven nanowire systems

Weighing graphene with QCM to monitor interfacial mass changes

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