YSZ thin films deposited by e-beam technique

Laukaitis, Giedrius; Dudonis, J.; Milčius, D.

doi:10.1016/j.tsf.2005.12.242

Cited by 44 publications

(31 citation statements)

References 13 publications

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“…XRD peaks of YSZ thin films indicate sharp (101) and minor (110), (200), (211), and (202) orientations. These YSZ thin films repeat the crystal structure of the chosen evaporated YSZ material [6].…”

Section: Resultsmentioning

confidence: 68%

“…The XRD diffraction patterns of the pressed YSZ powders are presented in [6]. It shows that the positions of the Bragg peaks are those typical of the tetragonal 8YSZ (according to Crystallographica Search-Match, Version 2).…”

Section: Resultsmentioning

confidence: 99%

“…YSZ powder was pressed to the pellets of 25 mm diameter and 2 mm thickness before deposition. YSZ thin films (1.5-2 µm thick) were deposited on Alloy-600 (Fe-Ni-Cr) [6]. Residual gas pressure in the vacuum chamber was 4·10 −3 Pa.…”

Section: Methodsmentioning

confidence: 99%

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Ionic conductivity of e-beam deposited yttrium stabilized zirconia thin films

Laukaitis¹

2007

Lithuanian J. Phys.

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In the present study yttrium stabilized zirconia (YSZ) thin films were deposited on the Alloy-600 and optical quartz substrates using e-beam deposition technique with controlled deposition parameters: substrate temperature (Ts) and electron gun power (P ) influencing the thin film deposition mechanism. The dependence of these parameters on thin film ionic conductivity, structure, and surface morphology was investigated by X-ray diffraction and scanning electron microscopy (SEM). It was found that electron gun power has the influence on the crystallite size, texture, and roughness of YSZ films. Dominating dispersion in the deposited YSZ thin films (substrate temperature T = 250• C, e-beam gun power P = 0.9 kW) relates to ionic transport in the crystallites in the measured frequency and temperature ranges. The measured values of conductivity and its activation energies are those typical of the polycrystalic ZrO2-8 mol% Y2O3 compound. The conductivity values of crystallites of YSZ thin films and ceramics are similar. Differences are found only in thin films deposited at T = 250• C and P = 0.66 kW.

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Section: Resultsmentioning

confidence: 68%

Section: Resultsmentioning

confidence: 99%

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Ionic conductivity of e-beam deposited yttrium stabilized zirconia thin films

Laukaitis¹

2007

Lithuanian J. Phys.

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“…deposition rate, chamber pressure, substrate temperature and substrate motion, has effect on the final coating structures. Laukaitis et al [9] have investigated the dependence of substrate temperature, electron gun power, and phase of ceramic powder on YSZ thin film structure and have reported that the YSZ films are cubic structure, and are independent on the structure of starting material when the electron gun power is higher than 1.0 kW. Wu et al [13] have obtained tetragonal phase YSZ films using Y 2 O 3 3 mol% evaporation materials when the deposition temperature is 350 C. It may be reasonable to believe that the microstructure of the YSZ is controlled by the process parameters.…”

Section: Optical Propertiesmentioning

confidence: 99%

“…Many techniques, including electron-beam evaporation [9], sputtering [10] and various chemical vapour deposition techniques [11,12] can be employed to deposit YSZ coatings. Among them, electron-beam evaporation method is a very attractive process for the production of thin and thick coatings on large and complex shaped substrates due to the low cost of equipment and a high deposition rate.…”

Section: Introductionmentioning

confidence: 99%