Abstract:In the present study yttrium stabilized zirconia (YSZ) thin films were deposited on the Alloy-600 and optical quartz substrates using e-beam deposition technique with controlled deposition parameters: substrate temperature (Ts) and electron gun power (P ) influencing the thin film deposition mechanism. The dependence of these parameters on thin film ionic conductivity, structure, and surface morphology was investigated by X-ray diffraction and scanning electron microscopy (SEM). It was found that electron gun … Show more
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