2007 International Symposium on Semiconductor Manufacturing 2007
DOI: 10.1109/issm.2007.4446880
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Yield considerations in the choice of 3D technology

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Cited by 34 publications
(23 citation statements)
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“…For the yield improvement of 3D ICs, a number of researches proposed wafer or die matching methodologies to maximize functional yield, parametric yield, and the corresponding profits [16][17][18]. Smith et al [16] showed the yield trend of 3D ICs compared to 2D ICs and an idea to improve the functional yield of wafer-to-wafer bonded 3D ICs by choosing wafer pairs whose patterns of working dies best match each other.…”
Section: Introductionmentioning
confidence: 99%
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“…For the yield improvement of 3D ICs, a number of researches proposed wafer or die matching methodologies to maximize functional yield, parametric yield, and the corresponding profits [16][17][18]. Smith et al [16] showed the yield trend of 3D ICs compared to 2D ICs and an idea to improve the functional yield of wafer-to-wafer bonded 3D ICs by choosing wafer pairs whose patterns of working dies best match each other.…”
Section: Introductionmentioning
confidence: 99%
“…Smith et al [16] showed the yield trend of 3D ICs compared to 2D ICs and an idea to improve the functional yield of wafer-to-wafer bonded 3D ICs by choosing wafer pairs whose patterns of working dies best match each other. Reda, Smith, and Smith [17] proposed wafer assignment algorithms to maximize the functional yield of 3D stacked ICs in wafer-to-wafer integration.…”
Section: Introductionmentioning
confidence: 99%
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“…Wafer matching has been researched to mitigate this drawback by many authors [17,20,21,24,27]; it is a technique based on the matching of wafers with similar fault maps. In case of a large stack size or low die yield, the improvement can be significant.…”
Section: W2w Matchingmentioning
confidence: 99%
“…Improve yield for 3D circuits based on wafer matching has been discussed by many authors [17,20,21,24,27]. In this paper, we use the adaptive Best Pair (BP) algorithm [24] to determine the yield increase due to wafer matching.…”
Section: Yield and Cost Models For Wafer Matchingmentioning
confidence: 99%