X-ray Mask with SiC Membrane for LIGA Process

A Study on the Sub-Micron LIGA Process

“…Based on these requirements, Au, SiC and Si were selected as the X-ray absorber, membrane and frame respectively. The thicknesses of SiC and Si were decided at was decided in the following procedure [7]. One of important items for evaluation of an X-ray mask is contrast, C, which is defined as the ratio of transmitted energy of the X-rays through the membrane, EM, to transmitted energy of the X-rays through the membrane and the absorber, EA;…”

Fabrication of Sub-Micron Structures with High Aspect Ratio for Practical MEMS

“…The required thickness of Au X-ray absorbers was decided in the following procedure [6]. A beam spectrum from AURORA is converted into an X-ray energy spectrum, e0, per unit time.…”