Abstract:SummaryMicrostructures with sub-micron widths and gaps (lines and spaces) can be applied to practical and high performance MEMS devices. In the sub-micron LIGA process, one of the most crucial considerations is the fabrication of an X-ray
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.