“Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

“…We also plan to change from argon to nitrogen plasma, where the emission is quasi-monochromaticmuch more suitable for high dispersion ZP objectives [37].…”

“…The EUV source, used in the experiment, has been developed for EUV metrology applications in the frame of MEDEA? project [36] and later modified for efficient emission of SXR radiation, including the ''water-window'' spectral region, previously reported in [37]. This source has an advantage over other compact sources that it is a debrisfree source and has a possibility to change the working gases, thus allowing to change both the peak emission wavelength and the inverse relative bandwidth of the emission.…”

“…The distance from the focal point to the nozzle plane was 1.5 mm to avoid nozzle damage by plasma formation. The details of the optimization were similar to one described previously in [37].…”

Radiative properties of non-equilibrium nitrogen plasma in soft x-ray range

“…Источники на его основе не имеют проблемы с загрязнением элементов системы. Азотная плазма может возникать при воздействии Nd:YAG или CO 2 лазера на мишень в виде газовой струи [21][22][23] или при разряде, инициируемом в разреженном газе или смеси газов [24]. Основная доля излучения в диапазоне водяного окна генерируется в районе длины волны 2.88 нм (1s2-1s2p переход в ионе N VI).…”

Excitation wavelength dependence of water-window line emissions from boron-nitride laser-produced plasmas

“…Nitrogen has been heavily investigated for use as a LPP target due to its strong emission lines in the WW region, Ly-a (2.48 nm) and He-a (2.88 nm) lines, and investigated nitrogen target configurations have included cryogenic liquid jets, [15][16][17][18][19] cryogenic solid nitrogen, 20 boron-nitride, 20,21 and gas jets. [22][23][24] The effect of laser wavelength on SXR emission from a carbon target excited by femtosecond laser pulses showed that shorter laser wavelength produced higher emission intensity, brightness, and conversion efficiency. 25 Experiments with liquid nitrogen targets using femto, pico, and nanosecond laser pulses showed that pico and nanosecond pulses provided higher conversion efficiencies than femtosecond pulses.…”