The 2-D computational code Z* is used to simulate physical phenomena in hollow cathode triggered lowpressure capillary discharge at different phases of the process: electron beam generation, formation of a channel by ionization wave, and discharge dynamics together with ionization kinetics and plasma emission, particularly in EUV band interesting for applications. Runaway electrons in gas-filled capillary discharge with hollow cathode play an important role both in ionization wave propagation, and in ionization of multicharged ions in discharge plasma. The electron beam prepares a tight ionized channel. The fast electrons shift the ionization equilibrium in discharge plasma increasing the EUV emission from relatively low-temperature plasma of argon or xenon. At ionization wave stage, the electron flow is simulated in electron-hydrodynamic model. At discharge stage, the plasma is described by the radiative magnetohydrodynamics with ionization kinetics and radiation transfer.
The multicharged plasma implosion stability with respect to Rayleigh–Taylor axial modes and its modification by the electromagnetic field diffusion and radiation cooling is considered. The exterior and the interior parts of an imploded plasma shell are examined and stability and conditions for magnetohydrodynamic Rayleigh–Taylor instability are obtained. The external surface is always unstable. The interior instability appears, as a rule, to be under a significant degree of compression near the final stage of implosion. Theoretical results and numerical simulations using the two-dimensional ZETA code are [R. Benattar et al., 4th International Conference on Dense Z pinches, Vancouver (American Institute of Physics, Woodbury, 1997), p. 211] compared. The modeling of the implosion of wire arrays and nested tungsten wire arrays on the Z generator by the two-dimensional magnetohydrodynamic code ZETA, including radiation transport with local thermodynamic equilibrium (LTE)—nonequilibrium (non-LTE) approximation, is performed in order to study the influence of instability level on high-Z plasma radiation and to reproduce the experimental results. It is shown that it is possible to fit the experimental results if a 10% level of initial mass perturbation of the tungsten wire arrays is imposed. The dynamics of the implosion and the development of Rayleigh–Taylor instability are discussed. The plasma of the Z pinch is shown to be in a non-LTE regime.
Extreme ultraviolet lithography semiconductor manufacturing requires a 13.5nm light source. Laser-produced plasma emission from Sn V–Sn XIV ions is one proposed industry solution. The effect of laser pulse width and spatial profile on conversion efficiency is analyzed over a range of power densities using a two-dimensional radiative magnetohydrodynamic code and compared to experiment using a 1.064μm, neodymium:yttrium aluminium garnet laser on a planar tin target. The calculated and experimental conversion efficiencies and the effects of self-absorption in the plasma edge are compared. Best agreement between theory and experiment is found for an 8.0ns Gaussian pulse.
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