Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Cun, Huanyao; Macha, Michał; Kim, Hokwon; Liu, Ke; Zhao, Yijiao; LaGrange, Thomas; Kis, András; Radenović, Aleksandra

doi:10.1007/s12274-019-2502-9

Cited by 114 publications

(112 citation statements)

References 37 publications

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“…Through the designed precursors and processes of serial reactions during growth, energy barriers of serial reactions could be drastically reduced, so as to the growth rates were consequently boosted. [ 59–62 ]…”

Section: Controls Of 2d Single‐crystal Growthmentioning

confidence: 99%

Designed Growth of Large‐Size 2D Single Crystals

Liu

Wang

et al. 2020

Advanced Materials

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In the “post‐Moore's Law” era, new materials are highly expected to bring next revolutionary technologies in electronics and optoelectronics, wherein 2D materials are considered as very promising candidates beyond bulk materials due to their superiorities of atomic thickness, excellent properties, full components, and the compatibility with the processing technologies of traditional complementary metal‐oxide semiconductors, enabling great potential in fabrication of logic, storage, optoelectronic, and photonic 2D devices with better performances than state‐of‐the‐art ones. Toward the massive applications of highly integrated 2D devices, large‐size 2D single crystals are a prerequisite for the ultimate quality of materials and extreme uniformity of properties. However, at present, it is still very challenging to grow all 2D single crystals into the wafer scale. Therefore, a systematic understanding for controlled growth of various 2D single crystals needs to be further established. Here, four key aspects are reviewed, i.e., nucleation control, growth promotion, surface engineering, and phase control, which are expected to be controllable at different periods during the growth. In addition, the perspectives on designed growth and potential applications are discussed for showing the bright future of these advanced material systems of 2D single crystals.

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Section: Controls Of 2d Single‐crystal Growthmentioning

confidence: 99%

Designed Growth of Large‐Size 2D Single Crystals

Liu

Wang

et al. 2020

Advanced Materials

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“…There are several suitable platforms for MoS 2 growth, with SiO 2 and sapphire being the most widely used due to their affordability. 12 Alternatively, graphene can also be used as a growth platform for MoS 2 . 3 Additionally, the use of a 2D material as a substrate for the growth of other 2D materials results in the creation of van der Waals (vdW) heterostructures.…”

Section: Introductionmentioning

confidence: 99%

Substrate-Induced Variances in Morphological and Structural Properties of MoS₂ Grown by Chemical Vapor Deposition on Epitaxial Graphene and SiO₂

Sitek

Płocharski

Pasternak

et al. 2020

ACS Appl. Mater. Interfaces

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In this work, we report the impact of substrate type on the morphological and structural properties of molybdenum disulfide (MoS 2 ) grown by chemical vapor deposition (CVD). MoS 2 synthesized on a three-dimensional (3D) substrate, that is, SiO 2 , in response to the change of the thermodynamic conditions yielded different grain morphologies, including triangles, truncated triangles, and circles. Simultaneously, MoS 2 on graphene is highly immune to the modifications of the growth conditions, forming triangular crystals only. We explain the differences between MoS 2 on SiO 2 and graphene by the different surface diffusion mechanisms, namely, hopping and gas-molecule-collision-like mechanisms, respectively. As a result, we observe the formation of thermodynamically favorable nuclei shapes on graphene, while on SiO 2 , a full spectrum of domain shapes can be achieved. Additionally, graphene withstands the growth process well, with only slight changes in strain and doping. Furthermore, by the application of graphene as a growth substrate, we realize van der Waals epitaxy and achieve strain-free growth, as suggested by the photoluminescence (PL) studies. We indicate that PL, contrary to Raman spectroscopy, enables us to arbitrarily determine the strain levels in MoS 2 .

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“…The second one relies on the addition of spin‐coated liquid‐phase growth promoters, sodium molybdate (Na 2 MoO 4 ) and alkaline salt, prior to the growth phase. [ 30,31 ] Using a spin‐coated Na 2 MoO 4 solution both to ensure uniform seeding and as an additional molybdenum source during growth step yields highly homogenous, large 2D crystals of MoS 2 , leading to continuous monolayer formation under proper process parameters. The use of alkaline salts as a crystal growth catalyst is a common practice in the MoS 2 synthesis protocols, [ 32–34 ] which lowers the density of nucleation sites and the melting point of the solid‐state precursors.…”

Section: Resultsmentioning

confidence: 99%

“…Typical growth step is performed in a homemade MOCVD, hot-wall, vertical furnace for 30 min at 850 °C under the flow of 210 sccm of Ar, 1 sccm of O 2 , 4 sccm of H 2 ( Figure S1, Supporting Information). In contrast to previous publications, [30,31,34] we are adding several new elements and improvements to our process. First, we use separate bubblers for Mo(CO) 6 and DES, which increases the control in delivering the gases into the chamber, and 12 sccm of Ar is flowing through a bubbler filled with, Mo(CO) 6 , and 3 sccm of Ar through separate DES bubbler.…”

Section: Wafer-scale Mos 2 Growth and Transfermentioning

confidence: 99%

Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS₂

et al. 2020

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Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Cited by 114 publications

References 37 publications

Designed Growth of Large‐Size 2D Single Crystals

Designed Growth of Large‐Size 2D Single Crystals

Substrate-Induced Variances in Morphological and Structural Properties of MoS₂ Grown by Chemical Vapor Deposition on Epitaxial Graphene and SiO₂

Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS₂

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Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Cited by 114 publications

References 37 publications

Designed Growth of Large‐Size 2D Single Crystals

Designed Growth of Large‐Size 2D Single Crystals

Substrate-Induced Variances in Morphological and Structural Properties of MoS2 Grown by Chemical Vapor Deposition on Epitaxial Graphene and SiO2

Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS2

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Substrate-Induced Variances in Morphological and Structural Properties of MoS₂ Grown by Chemical Vapor Deposition on Epitaxial Graphene and SiO₂

Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS₂