2020
DOI: 10.1002/smtd.202000072
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Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing using MoS2

Abstract: Nanopore-based sensing is attractive in the field of singlemolecule detection as it offers low-cost, label-free, and

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Cited by 36 publications
(48 citation statements)
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“…Electrostatic or optical gating of the confinement is expected to provide a crucial transition from a closed to an opened state within the system. The current status of nanofabrication allows us to create wafer-scale batches of devices showing a corresponding quality [ 22 ], and to combat one of the most important bottlenecks in nanopore research field—the small amount of nanopore devices and consequently low statistics of the measurements. Together with the demonstrated pioneer approaches [ 68 , 69 , 81 ] the nanopore research field is reaching the limitations and heading towards the achievement of the controlled confinement that would allow us to probe charged states within the pore on a single-ion level.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Electrostatic or optical gating of the confinement is expected to provide a crucial transition from a closed to an opened state within the system. The current status of nanofabrication allows us to create wafer-scale batches of devices showing a corresponding quality [ 22 ], and to combat one of the most important bottlenecks in nanopore research field—the small amount of nanopore devices and consequently low statistics of the measurements. Together with the demonstrated pioneer approaches [ 68 , 69 , 81 ] the nanopore research field is reaching the limitations and heading towards the achievement of the controlled confinement that would allow us to probe charged states within the pore on a single-ion level.…”
Section: Discussionmentioning
confidence: 99%
“…Artificial nanofluidic devices developed for single-ion conductivity measurements provide a unique opportunity to test the proposed models and reveal the many-body effects in ionic systems. This perspective article aims to discuss practical challenges in verifying the models that evoke ionic Coulomb blockade in a variety of settings that are now available due to recent progress in nanofabrication [ 12 , 22 , 23 ]. Furthermore, it also provides suggestions for the integration of additional approaches such as modulation of the charges, pressure, pH, ionic strength, temperature, and potential in the range not attainable on lipid bilayers.…”
Section: Introductionmentioning
confidence: 99%
“…However, the transfer process may damage the film and usually requires a polymer coating which leaves unwanted residues. 175 Optimised methods for transferring MoS 2 films to apertures in SiN x membranes on the wafer scale have been published, 62,176 however, transfer was only successful in 70% of the devices. 176 To overcome this, a method to grow MoS 2 177 and graphene 178 directly over apertures in SiN x membranes has been developed.…”
Section: Electrochemical Reactionmentioning
confidence: 99%
“…Artificial nanopores can be classified according to their aspect ratio. The 2D materials are the most promising to discriminate single nucleotides with potential applications in DNA sequencing [ 23 , 24 ]. The SiN and other nitride-based materials are the most used for single molecule sensing.…”
Section: Introductionmentioning
confidence: 99%