Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

Caronti, A.; Majjad, Hicham; Ballandras, S.; Caliano, G.; Carotenuto, Riccardo; Iula, Antonio; Foglietti, V.; Pappalardo, M.

doi:10.1109/58.990937

Cited by 23 publications

(16 citation statements)

References 6 publications

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“…It should be noted that the amplitudes of the in-and out-of-plane vibrations cannot be compared to each other due to differences in the detection principles. were obtained by fitting a sum of two separate theoretical responses, described by (2). The same applies for the inplane component measured in vacuum, figure 14(b).…”

Section: Extraction Of Quality Factorsmentioning

confidence: 99%

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Analysis of vibration modes in a micromechanical square-plate resonator

Holmgren

Kokkonen

Veijola³

et al. 2008

J. Micromech. Microeng.

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Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13.1 MHz. The resonator is designed to utilize a square-extensional vibration mode in which the vibrations mainly take place in the direction parallel to the surface of the plate. A special detection scheme was used to allow measurement of the in-plane vibrations in addition to the out-of-plane component detected by the interferometer. The measured vibration modes were compared to numerical finite-element simulations with good agreement. In particular, it was found out that the out-of-plane vibration field measured at the resonance frequency of the main mode is a superposition of a parasitic vertical vibration mode and the out-of-plane component of the main mode. Furthermore, the measurements revealed undesirable vibrations in the anchor regions indicating energy leakage from the resonator causing additional losses. The quality factors of the vibration modes were also determined from the laser-probe measurements and they agree quite well with those determined from electrical measurements.

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Section: Extraction Of Quality Factorsmentioning

confidence: 99%

“…Recently, MEMS have been characterized with scanning interferometers [2][3][4][5] as well as with feedback interferometry [6,7]. In addition, the vibration mode shapes of cantilever microbeams, micromachined membranes and microrings have been measured using an interferometric microscope with stroboscopic illumination [8,9].…”

Section: Introductionmentioning

confidence: 99%

Analysis of vibration modes in a micromechanical square-plate resonator

Holmgren

Kokkonen

Veijola³

et al. 2008

J. Micromech. Microeng.

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“…11 The mass density of silicon nitride is assumed to equal 3 260 kg/ m 3 , its elastic constants are as follows C 11 = 345 GPa, C 12 = 125 GPa, C 22 = 395 GPa, C 66 = 118 GPa. A period of 50 m together with an aperture of 40 m (the "length" of the membrane) are considered, as well as a membrane thickness of 0.5 m and a gap of 0.5 m conformably to what is developed experimentally in our project.…”

Section: A Simplified Model Using a Uniform Excitationmentioning

confidence: 99%

“…Numerous sets of data are found in the literature concerning the elastic properties of silicon nitride. 11 The force was arbitrarily fixed to 4 N, yielding a stress equal to 10 5 Pa (the value actually programmed in the simulation). 11 The mass density of silicon nitride is assumed to equal 3 260 kg/ m 3 , its elastic constants are as follows C 11 = 345 GPa, C 12 = 125 GPa, C 22 = 395 GPa, C 66 = 118 GPa.…”

Section: A Simplified Model Using a Uniform Excitationmentioning

confidence: 99%

Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers

Ballandras

Wilm

Daniau

et al. 2004

Journal of Applied Physics

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The possibility to excite and detect acoustic waves in fluids using capacitive transducers built on silicon using surface micromachining offers attractive opportunities in the manufacturing of high quality low cost imaging probes. As in the case of standard probe transducers, simulation codes are required to accurately design such devices. The periodic structures extensively used for these capacitive transducers has to be accounted for. In this work, a two-dimensional finite element analysis of capacitive micromachined ultrasonic transducers (cMUT) is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using different computation approaches. It is then shown that the periodic computations provide a rapid and precise analysis of the cMUT compared to non periodic calculations. The mutual displacements are deduced from the periodic harmonic calculation, providing an efficient estimation of cross-talk phenomena arising for cMUT radiating in water. The capability of cMUT operating under such conditions to generate a low velocity wave guided at the fluid/silicon interface is theoretically pointed out.

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“…Circular microplates are commonly electrically actuated in capacitive micromachined ultrasonic transducers (CMUTs) in both air [1][2][3][4][5][6][7][8][9] and liquids [4,[10][11][12]. The circular microplate is typically composed of a single silicon crystal or silicon nitride and is suspended above a heavily doped silicon bulk material.…”

Section: Introductionmentioning

confidence: 99%

Primary resonance excitation of electrically actuated clamped circular plates

Vogl

Nayfeh

2006

Nonlinear Dyn

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We investigate the response of an electrically actuated clamped circular plate to a primary resonance excitation of its first axisymmetric mode using an analytical reduced-order model (macromodel). We discuss the influence of the number of modes retained in the discretization on the predicted solutions. The reduced-order model, which is a system of coupled nonlinear ordinary-differential equations, accounts for general residual stress and strain hardening and allows for general material and geometric design variables. Our reduced-order model is robust up to the pull-in instability and is general enough to be an effective design tool for capacitive micromachined ultrasonic transducers.

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Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

Cited by 23 publications

References 6 publications

Analysis of vibration modes in a micromechanical square-plate resonator

Analysis of vibration modes in a micromechanical square-plate resonator

Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers

Primary resonance excitation of electrically actuated clamped circular plates

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