Analysis of vibration modes in a micromechanical square-plate resonator

Holmgren, O.; Kokkonen, Kimmo; Veijola, Timo; Mattila, T.; Kaajakari, V.; Oja, Aarne; Knuuttila, J.V.; Kaivola, Matti

doi:10.1088/0960-1317/19/1/015028

Cited by 26 publications

(11 citation statements)

References 30 publications

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“…B) Rescaling of the signal we can obtain a Bessel spectra corresponding to the energy curvature. The numerical operative sequences are realized to obtain this spectrum [20,21].…”

Section: Curvature Energyto Design a Quantum Gravity Sensormentioning

confidence: 99%

Quantum Gravity Sensor by Curvature Energy: their Encoding and Computational Models*

Bulnes¹

2014

SpecialIssue

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Abstract-Through of the concept of curvature energy encoded in non-harmonic signals due to the effect that characterizes the curvature as a deformation of field in the corresponding resonance space ( and an obstruction to the displacement to the corresponding shape operator) is developed and designed a sensor of quantum gravity considering the quantized version of curvature as observable of gravitational field where the space is distorted by the strong interactions between particles, interpreting their observable in this case, as light fields deformations obtained on space-time background. To the application of this measurement we use a hypothetical particle graviton modeled as a magnetic dilaton which must be gauge graviton (gauge boson). Also are obtained several computational models of these photonic measurements, likewise their prototype photonic devices.

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“…B) Rescaling of the signal we can obtain a Bessel spectra corresponding to the energy curvature. The numerical operative sequences are realized to obtain this spectrum [20,21].…”

Section: Curvature Energyto Design a Quantum Gravity Sensormentioning

confidence: 99%

Quantum Gravity Sensor by Curvature Energy: their Encoding and Computational Models*

Bulnes¹

2014

SpecialIssue

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“…The resonator plate is attached to the substrate at its corners with 4-µm-wide meander anchors. The top-electrode, a 300-nm-thick Mo layer, is patterned with a 5-µm-period grid of circular, 2.5-µm-diameter holes in order to create reflectivity variations for the detection of IP vibration fields with the laser probe [10], [11]. The Si plate itself acts as a bottom electrode.…”

Section: Mems Resonator Samplesmentioning

confidence: 99%

“…The setup is capable of amplitude and phase measurements of both IP [10], [11] and OP [15] surface vibration fields and it also enables the use of different excitation and detection frequencies for the study of nonlinear acoustic phenomena.…”

Section: Measurementsmentioning

confidence: 99%

Laser probing of nonlinearities in MEMS resonators

Lipiäinen

Jaakkola

Kokkonen

et al. 2012

2012 IEEE International Ultrasonics Symposium

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Nonlinear effects have become an important issue in microacoustic component development to improve performance. In addition to the modeling, simulations and electrical characterization tools, a direct method for observing the nonlinear vibration fields in these components would be beneficial in the device design. We use laser probing for studying the nonlinear acoustic behavior in two square-extensional (SE) mode MEMS resonators, whose electrically measured SE-resonances compress above a certain, unexpectedly low, input drive power level. In the laser probe measurements, the vibration amplitude of the SE mode is observed to nearly saturate above this drive power level, and simultaneously another mode at a different frequency is excited. It is also observed that the nonlinearly excited modes are different in the two resonators, and each resonator has a distinct nonlinear behavior.

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“…The instrument is also capable of detecting the IP vibration component applying a method that makes use of the surface structure of the sample [7], [8]. The minimum detectable IP amplitude is typically ∼ 10 pm.…”

Section: Measurementsmentioning

confidence: 99%

Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

Lipiäinen

Kokkonen

Jaakkola

et al. 2010

2010 IEEE International Ultrasonics Symposium

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We report laser probing results on a set of piezoelectrically actuated square plate MEMS resonators. The plate size of the resonators is systematically varied in order to study the frequency scaling of the main, square-extensional resonance mode in the range between 13-30 MHz. In electrical impedance measurements, an unexpected splitting of the main mode branch into two separate mode branches is observed at intermediate plate size dimensions. To get further insight of the origin of the splitting phenomenon, the two observed mode branches are directly measured by laser probing. The laser probe measurements confirmed that the vibration modes on both branches had a lateral vibration field characteristic for a square-extensional mode. Furthermore, the results indicate that the square-extensional mode may couple to other resonance modes occurring around 20-22 MHz, hence causing the splitting of the mode branch.

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Analysis of vibration modes in a micromechanical square-plate resonator

Cited by 26 publications

References 30 publications

Quantum Gravity Sensor by Curvature Energy: their Encoding and Computational Models*

Quantum Gravity Sensor by Curvature Energy: their Encoding and Computational Models*

Laser probing of nonlinearities in MEMS resonators

Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

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