2003
DOI: 10.1016/s0925-4005(02)00471-9
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Very sensitive porous silicon NO2 sensor

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Cited by 109 publications
(72 citation statements)
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“…A simple cheap gas detectors that are super-sensitive, could be based on resistive PS elements (Pancheri et al, 2003). Researchers at the University of Brescia, have patented a technique using a porous silicon membrane on alumina substrate which could sense NO 2 as low as 100 parts per billion (ppb) at room temperature using low power and with a minimum interference from the contaminant organic vapors (Baratto et al, 2000).…”
Section: Porous Silicon Gas Sensormentioning
confidence: 99%
“…A simple cheap gas detectors that are super-sensitive, could be based on resistive PS elements (Pancheri et al, 2003). Researchers at the University of Brescia, have patented a technique using a porous silicon membrane on alumina substrate which could sense NO 2 as low as 100 parts per billion (ppb) at room temperature using low power and with a minimum interference from the contaminant organic vapors (Baratto et al, 2000).…”
Section: Porous Silicon Gas Sensormentioning
confidence: 99%
“…Although very high sensitivities have often been reported, selectivity is rarely an issue [80,81]. Actually, the instability of the native surface termination is the major barrier preventing wide applications of PS in the sensor field.…”
Section: Crystalline Siliconmentioning
confidence: 99%
“…Это мо-жет быть использовано, например, в нелинейной оптике для фазового согласования процесса генерации второй гармоники [2,6], а также в оптоэлектронике для создания устройств переключения света [7]. Благодаря развитой внутренней поверхности por-Si и чувствительности его электронных и оптических свойств к диэлектрической проницаемости окружающей среды данный материал может быть использован в газовых сенсорах, включая устройства с оптическим детектированием [7][8][9].…”
Section: Introductionunclassified