Vertical silicon nanowire array‐patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols

Wasisto, Hutomo Suryo; Merzsch, Stephan; Steib, Frederik; Waag, A.; Peiner, Erwin

doi:10.1049/mnl.2014.0249

Cited by 27 publications

(12 citation statements)

References 15 publications

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“…For instance, silicon cantilever sensors are based on traditional fabrication techniques and can easily be integrated with on-chip signal processing based on CMOS technology. In recent years, continuous improvement in the performance of silicon cantilever sensors has been reported by innovative engineering techniques [ 55 – 65 ]. Silicon cantilevers depict excellent stability against moisture and have better thermal stability.…”

Section: Generic Device Details and Working Principlementioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Section: Generic Device Details and Working Principlementioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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“…Afterwards, the 3D GaN fin LED arrays were created by means of hybrid etching combining both SF6/H2-based ICP-DRIE and KOH-based post-wet chemical etching. It should be noted that the 500 nm thick chromium deposited via electron beam evaporation and partially removed by lift-off was necessary to be used as hard etching mask instead of only photoresist like in Si-based etching [3] due to GaN hardness. To obtain high-aspect-ratio GaN structures with smooth sidewalls and to guarantee insulation among the fins, two-step hybrid etching was employed, which is an enhancement from our previous GaN nanowire etching technique [4,5].…”

Section: Device Fabricationmentioning

confidence: 99%

InGaN/GaN nanoLED Arrays as a Novel Illumination Source for Biomedical Imaging and Sensing Applications

et al. 2018

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Guidelines for the fabrication of nanoscale light-emitting diode arrays (i.e., nanoLED arrays) based on patterned gallium nitride (GaN) with very small dimensions and pitches have been derived in this work. Several challenges during top-down LED array processing have been tackled involving hybrid etching and polymer-based planarization to yield completely insulated highaspect-ratio LED fin structures and support the creation of p-GaN crossing line contacts, respectively. Furthermore, simulations of the light emission patterns were also performed providing hints for enhancing the device designs. As a result, regardless of the required device processing optimization, the developed nanoLED arrays are expected to offer high potential as novel illumination sources in biomedical imaging and sensing applications (e.g., mini compact microscopes and wearable biological/chemical nanoparticle counters)

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“…Gas is one of the early characteristics of fire. The main gases used to detect fire include CO, CO 2 , NOx, methane, H 2 , H 2 O, amine (−NH 2 ) (Xue et al, 2005;Wasisto et al, 2014). When a fire occurs, the temperature rises significantly, and the change of temperature can be detected by temperature sensor; the photoelectric detection for fire warning generates radiation light through flame combustion, and the sensor responds to the detection of light to detect the fire (Kwangjae et al, 2017).…”

Section: Introductionmentioning

confidence: 99%

Application Status of Carbon Nanotubes in Fire Detection Sensors

Xiao

Weng

et al. 2020

Front. Mater.

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With the rapid development of the city, all kinds of high-rise buildings, large shopping malls and entertainment places have been built one after another. There are some hidden dangers of fire accidents. Effective prevention and monitoring of fire is the focus of fire prevention and control field. As the information source of fire prevention and control, the preparation of fire detection sensor with high sensitivity and short response time is of great significance for fire prevention and monitoring. At present, the commonly used fire detection sensors mainly include CO sensor, temperature sensor and flame sensor. The sensors detect the characteristic parameters in the fire environment and converts non-electric signals such as gas, temperature, and flame light into electric signals to achieve the purpose of fire warning. With the development of material technology in recent years, especially the development of Carbon Nanotube (CNT) technology, a new fire detection sensor represented by CNT materials has emerged. In this paper, the research progress of CNTs in fire detection sensors is reviewed. The applications of CNTs in CO detection, flame light detection and temperature detection are discussed in detail. Finally, the development trend of fire detection sensors based on CNTs is proposed, and the development direction of fire detection sensors in the Internet of things is prospected.

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Vertical silicon nanowire array‐patterned microcantilever resonators for enhanced detection of cigarette smoke aerosols

Cited by 27 publications

References 15 publications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

InGaN/GaN nanoLED Arrays as a Novel Illumination Source for Biomedical Imaging and Sensing Applications

Application Status of Carbon Nanotubes in Fire Detection Sensors

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