Vertical multiple-slot waveguide ring resonators in silicon nitride

Vivien, Laurent; Marris‐Morini, Delphine; Griol, Amadeu; Gylfason, Kristinn B.; Hill, Daniel; Álvarez, J. Raziel; Sohlström, Hans; Hurtado, Juan; Bouville, David; Cassan, Éric

doi:10.1364/oe.16.017237

Cited by 44 publications

(21 citation statements)

References 12 publications

(19 reference statements)

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“…However, the slot-waveguide principle can be extended to other geometries such as vertical multi-slot [26,27] and horizontal (multi-)slot waveguides [28,29]. Both types of structures have been demonstrated to operate properly as passive optical elements in Si/SiO 2 [26,29], Si/Si 3 N 4 /SiO 2 [28] and Si 3 N 4 /SiO 2 [27] material systems. Figure 9 shows a schematic cross-sectional view of a multi (triple)-slot waveguide.…”

Section: Slot-waveguide Based Refractometric Sensorsmentioning

confidence: 99%

Optical Slot-Waveguide Based Biochemical Sensors

Barrios

2009

Sensors

155

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Slot-waveguides allow light to be guided and strongly confined inside a nanometer-scale region of low refractive index. Thus stronger light-analyte interaction can be obtained as compared to that achievable by a conventional waveguide, in which the propagating beam is confined to the high-refractive-index core of the waveguide. In addition, slot-waveguides can be fabricated by employing CMOS compatible materials and technology, enabling miniaturization, integration with electronic, photonic and fluidic components in a chip, and mass production. These advantages have made the use of slot-waveguides for highly sensitive biochemical optical integrated sensors an emerging field. In this paper, recent achievements in slot-waveguide based biochemical sensing will be reviewed. These include slot-waveguide ring resonator based refractometric label-free biosensors, label-based optical sensing, and nano-opto-mechanical sensors.

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Section: Slot-waveguide Based Refractometric Sensorsmentioning

confidence: 99%

Optical Slot-Waveguide Based Biochemical Sensors

Barrios

2009

Sensors

155

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“…The penalty is increased losses, a lower Q, and in turn increased noise, i.e., a drift to the right in the figure. This was observed for guides of multi-slots [21]. Theoretically, they have even higher refractive index sensitivity, but this comes at the cost of an increased loss due to an overall greater side surface area contributing to the light scattering.…”

Section: Sabio Measurements and Discussionmentioning

confidence: 87%

“…The gray scale then represents the minimum detectable refractive index change. Examples included are Hu et al [22] Haneumegowda et al [23] Fan et al [24] Carlborg et al [21] (the SABIO device), Claes et al [25] (an INTOPSENS prototype), Yalcin et al [26] De Vos et al [27] Pfeifer [28], and Kabashin et al [29] related mortality: 20-30%, this can be significantly reduced when a suitable anti-biotherapy is administered within 24-48 h. The current lack of documentation (negative blood culture), however, has led to both an empirical therapy with multiple drug treatments which has resulted in growing antibiotic resistance, and an excess of high-cost investigation. The EC project consortium of INTOPSENS is therefore developing a state-of-the-art diagnostics platform via an integrated microfluidic sample preparation technique capable of rapid bacteria isolation from whole blood.…”

Section: Socioeconomic Problemmentioning

confidence: 99%

Advances in Nanophotonic Sensing Technologies During Three International Label-Free Lab-On-Chip Projects

Hill

2011

BioNanoSci.

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We review the results from the use of various integrated nanophotonic sensors for label-free biosensing developed in three recent European biosensor collaborations: SABIO, INTOPSENS, and POSITIVE. Nanophotonic transducers are attractive for label-free biosensing due to their small footprint, high Q-factors, and compatibility with on-chip optics and microfluidics. This enables integrated sensor arrays for compact labs-on-chip. One application of label-free sensor arrays is for point-of-care medical diagnostics. Bringing such powerful tools to the single medical practitioner is an important step towards personalized medicine, but requires addressing a number of issues: improving limit of detection, managing the influence of temperature, parallelization of the measurement for higher throughput and on-chip referencing, efficient lightcoupling strategies to simplify alignment, and packaging of the nanophotonics chip and integration with microfluidics. From SABIO, we report a volume sensing sensitivity of 240 nm/RIU and detection limit of 5×10 −6 RIU, and a surface sensing limit of detection (LOD) of 0.9 pg/mm 2 for at 1.3 μm for an eight-channel slot-waveguide ring resonator sensor array, within a microfluidics integrated compact cartridge. In INTOPSENS, ongoing efforts have so far resulted in various nanophotonic transducer designs with volume sensing sensitivities as great as 2,169 nm/RIU and LODs down to 8.3×10 −6 RIU at 1.5 μm. Early experiments from the POSITIVE project have demonstrated volumetric sensitivities as high as 1,247 nm/RIU at 1.5 μm.

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“…The measured coupling efficiencies of these grating couplers are higher than 60 % at a wavelength of 1.31 μm due to the presence of a top silicon oxide cladding layer with optimized thickness [22]. Ring resonator devices based on vertical multiple-slot silicon nitride waveguides for both TE and TM polarizations were demonstrated with high Q-factors as high as 6,100 and 16,000 for TE and TM polarizations, respectively [23].…”

Section: Related Projectsmentioning

confidence: 99%

Silicon photonics developments in Europe

et al. 2009

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Silicon photonics have generated an increasing interest in the recent year, mainly for optical telecommunications or for optical interconnects in microelectronic circuits. The rationale of silicon photonics is the reduction of the cost of photonic systems through the integration of photonic components and an IC on a common chip, or in the longer term, the enhancement of IC performance with the introduction of optics inside a high performance chip. In order to build a Opto-Electronic Integrated circuit (OEIC), different European project has been launched in Europe. The PICMOS project demonstrated the full optical link on a silicon circuit with InP bonded devices. The following WADIMOS project goes a step further with the demonstration of an optical network on chip with WDM µlaser for onchip intraconnection between IC cores. The UK silicon photonics project and the European HELIOS project are focalized on telecommunications devices with the aim of photonics and electronics integration which can be done either by wafer bonding of an SOI photonic circuit or by low temperature fabrication of a photonic layer at the metallization levels. Recent development on building blocks will be reported such as low loss couplers, Si and InP µdisk modulators, high speed Ge or InGaAs photodetectors.

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Vertical multiple-slot waveguide ring resonators in silicon nitride

Cited by 44 publications

References 12 publications

Optical Slot-Waveguide Based Biochemical Sensors

Optical Slot-Waveguide Based Biochemical Sensors

Advances in Nanophotonic Sensing Technologies During Three International Label-Free Lab-On-Chip Projects

Silicon photonics developments in Europe

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