Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200mm wafers

Pouydebasque, A.; Bridoux, Claudine; Jacquet, F.; Moreau, S.; Sage, Eric; Saint-Patrice, D.; Bouvier, Christophe; Kopp, Christophe; Marchand, Gilles; Bolis, Sébastien; Sillon, N.; Vigier-Blanc, E.

doi:10.1016/j.sna.2011.05.005

Cited by 28 publications

(15 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Reducing the inner diameter, however, increases the maximal focal power range as shown in figure 10, in agreement with (7) (see table 2). The deviation between the analytical estimate and the experimental result decreases with increasing inner diameter (and fixed outer diameter) as the amount of piezo material increases and hence the effect of the glass membrane stiffness decreases.…”

Section: Evaluation Of Measurement and Simulationsupporting

confidence: 83%

“…This onset of the buckling occurs between 0 and 0.1 kV mm for the 50 µm membrane and between 0.5 and 0.8 kV mm for the 70 µm membrane. The dashed line shows the fit of the function f −1 = b √ E − E 0 comparing the measurement to the analytic evaluation in (7) and introducing an offset electric field E 0 as a starting point for the buckling. The fit was evaluated only over the central third of the measurement to neglect the transition zone and the zone where high forces dominate.…”

Section: Evaluation Of Measurement and Simulationmentioning

confidence: 99%

See 1 more Smart Citation

Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects

Lemke

Frey

Bruno

et al. 2019

Smart Mater. Struct.

View full text Add to dashboard Cite

In this paper we present and verify the non-linear simulation of an aspherical adaptive lens based on a piezo-glass sandwich membrane with combined bending and buckling actuation. To predict the full non-linear piezoelectric behavior, we measured the non-linear charge coefficient, hysteresis and creep effects of the piezo material and inserted them into the FEM model using a virtual electric field. We further included and discussed the fabrication parameters -glue layers and thermal stress -and their variations. To verify our simulations, we fabricated and measured a set of lenses with different geometries, where we found good agreement and show that their qualitative behavior is also well described by a simple analytical model. We finally discuss the effects of the geometry on the electric response and find, e.g., an increased focal power range from ±4.5 to ±9 m −1 when changing the aperture from 14 to 10 mm.

show abstract

Section: Evaluation Of Measurement and Simulationsupporting

confidence: 83%

Section: Evaluation Of Measurement and Simulationmentioning

confidence: 99%

Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects

Lemke

Frey

Bruno

et al. 2019

Smart Mater. Struct.

View full text Add to dashboard Cite

show abstract

“…While liquid lenses without a membrane generally rely upon electromagnetic or thermal properties of the liquids themselves in order to actuate the lens [8,9,10,11,12,13,14], liquid lenses formed with the addition of a simple membrane can be actuated through a much wider range of mechanisms. Thanks to the near-incompressibility of liquids, these lenses can utilize a variety of different actuators, including pneumatic [15,16,17,18,19], electrowetting [20,21,22,23,24], magnetic/electromagnetic [25,26], piezoelectric [27,28,29,30,31,32], electrostatic [33], dielectrophoretic [11,34], or any other actuator that can be coupled to a sealed liquid chamber to provide focus tuning. Electromagnetic actuators are particularly appealing because they can enable extremely fast response times on the order of 2–3 ms [35,36].…”

Section: Introductionmentioning

confidence: 99%

Lorentz Force Actuated Tunable-Focus Liquid Lens

2019

View full text Add to dashboard Cite

Tunable-focus liquid lenses provide focal length tuning for optical systems, e.g., cameras, where physical movement of rigid lenses are not an option or not preferable. In this work we present a magnetically actuated liquid lens utilizing the Lorentz force to vary the focal length as the current through the system is varied. The resulting lens can operate as both a diverging and a converging lens depending on the direction of current applied and has a large range of focal lengths, from −305 mm to –111 mm and from 272 mm to 146 mm. We also characterized the aberrations of the lens during the actuation with a Shack–Hartmann wavefront sensor, and utilized the lens for imaging, during which we measured a resolution of 7.13 lp/mm.

show abstract

“…In order to increase the WLC optical performances, it is very interesting to integrate into the camera modules some active optical elements such as auto-focus or zoom devices. Many developments are currently done on these active optical elements mostly based on MEMS technologies [2]. In term of waferlevel integration, several new key technologies are requested and the whole waferlevel camera structure is becoming more and more complex.…”

Section: Introductionmentioning

confidence: 99%

Ultra low cost wafer level via filling and interconnection using conductive polymer

Saint-Patrice

Jacquet

Bridoux

et al. 2011

2011 IEEE 61st Electronic Components and Technology Conference (ECTC)

View full text Add to dashboard Cite

Devices for consumers like camera phones are essentially driven by the cost and performances. In that scope, several new key technologies are requested to achieve a complete active waferlevel camera (with autofocus or zoom). A low cost vias interconnection has to be developed and conductive polymer is an attractive solution to overcome this challenge.In this paper we describe new technology to fill insulated vias and perform interconnection with conductive polymer with screen printing equipment.In the first part, process flow compatible with waferlevel camera integration is presented to make vias and metal routing. Then, polymer characterizations were done to evaluate Dupont CB100 resistivity and contact resistance with our metallization.Electrical contacts have been demonstrated with values about 100m and proflow configuration.Thermal cycling between -40°C to +85°C was performed successfully and no variation was observed even after 300 cycles. These results are very promising and give us a first feedback on this technology ability to withstand classical consumer product environmental tests.

show abstract

Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200mm wafers

Cited by 28 publications

References 20 publications

Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects

Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects

Lorentz Force Actuated Tunable-Focus Liquid Lens

Ultra low cost wafer level via filling and interconnection using conductive polymer

Contact Info

Product

Resources

About