Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials 2003
DOI: 10.7567/ssdm.2003.g-6-4
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Variable RF Inductor on Si CMOS Chip

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Cited by 6 publications
(5 citation statements)
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“…Here, the variable MEMS inductors are explained [9,10,11,12]. The variable inductor consists of a conventional planar spiral inductor, a metal plate and a MEMS actuator.…”
Section: V P Cmentioning
confidence: 99%
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“…Here, the variable MEMS inductors are explained [9,10,11,12]. The variable inductor consists of a conventional planar spiral inductor, a metal plate and a MEMS actuator.…”
Section: V P Cmentioning
confidence: 99%
“…However, they have large series resistance caused by the onresistance in transistor channel, so it is difficult to achieve highquality RF circuit. Recently, the variable capacitor and inductor using MEMS technology are proposed [8,9,10,11,12], which practically achieve wide-range and high-quality characteristics. They have high potential for the reconfigurable RF circuit design, while the manufacturing cost is not low at present time.…”
Section: V P Cmentioning
confidence: 99%
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“…We have previously proposed a variable inductor [4,5]. That was assumed to have a comb-type MEMS actuator, which provides horizontal movement [6].…”
Section: Principle Of Variable Inductormentioning
confidence: 99%
“…However, in the case of on-chip inductors, several papers on proposals for variable inductors have been reported, and we have proposed on-chip variable inductors. [1][2][3][4][5] The variable inductor is a key passive component for realizing multi band RF circuits. 6) In this work, we propose a novel and simple structure for an onchip variable inductor to expand the variable ratio of inductance, and we achieve a variable ratio 13% larger than those of conventional variable inductors.…”
Section: Introductionmentioning
confidence: 99%