Variable Optical Attenuator with Tunable Nonsmooth Curved Mirror

Lin, Cheng; Wen, Shih Yi; Hsu, Wensyang

doi:10.1143/jjap.43.7764

Cited by 3 publications

(2 citation statements)

References 6 publications

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“…A concave surface profile with micrometre-scale dimensions is of interest because of its ability to focus incoming light into a spot. Concave mirrors act like optical tweezers to trap/push particles with the optical gradient/scattering force [50,51] and may be used as a variable optical attenuator [52] or to produce an enhanced and localized light signal for parallel low loss optical interconnect systems [53]. We have fabricated very smooth, concave mirrors [41] using ion irradiation of a resist patterned as an annulus, using the same process to produce undercut structures as shown in figure 6(a).…”

Section: Micromirrors-spherical Surface Patterningmentioning

confidence: 99%

Three-dimensional silicon micromachining

Azimi

Song

Dang

et al. 2012

J. Micromech. Microeng.

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A process for fabricating arbitrary-shaped, two-and three-dimensional silicon and porous silicon components has been developed, based on high-energy ion irradiation, such as 250 keV to 1 MeV protons and helium. Irradiation alters the hole current flow during subsequent electrochemical anodization, allowing the anodization rate to be slowed or stopped for low/high fluences. For moderate fluences the anodization rate is selectively stopped only at depths corresponding to the high defect density at the end of ion range, allowing true three-dimensional silicon machining. The use of this process in fields including optics, photonics, holography and nanoscale depth machining is reviewed.

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Section: Micromirrors-spherical Surface Patterningmentioning

confidence: 99%

Three-dimensional silicon micromachining

Azimi

Song

Dang

et al. 2012

J. Micromech. Microeng.

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“…In bio-sensing or cell trapping devices, incoming laser that is focused by such a concave mirror acts like optical tweezers to trap/push particles with the optical gradient/scattering force [1,2]. In the field of micro-electro-mechanical-systems (MEMS) and optoelectronics, it may be used as a variable optical attenuator [3] or to produce an enhanced and localized light signal for parallel low loss optical interconnect systems [4]. From these concave profiles, it is possible to further fabricate concave optical cavities by coupling two such mirrors together or with an optical fiber [5].…”

Section: Concave Mirrors and Lensesmentioning

confidence: 99%

Fabrication of concave silicon micro-mirrors

Ow¹,

Breese²,

Azimi³

2010

Opt. Express

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We have fabricated spherical and cylindrical concave micro-mirrors in silicon with dimensions from 20 microm to 100 microm. The fabrication process involves standard photolithography followed by large area ion beam irradiation and electrochemical anodisation in a HF electrolyte. After thermal oxidation the silicon surface roughness is less than 2 nm. We also present a multilayer porous silicon distributed Bragg reflector fabricated on concave silicon surfaces which selectively reflect and focus a band of wavelengths from a parallel beam of incident white light. Development of such low roughness concave microstructures opens up new applications in areas such as silicon photonics and quantum information science.

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