Validation of The Charge Pumping Method down to Liquid Helium Temperature

Nguyen-Duc, Ch.; Ghibaudo, G.; Balestra, F.

doi:10.1002/pssa.2211260237

Cited by 4 publications

(1 citation statement)

References 7 publications

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“…Dedicated methods can be used to obtain the interface state density (N it ) at the gate-oxide/semiconductor interface in FETs, such as charge pumping or based on capacitance-voltage measurements. 41,58,59 On the other hand, N it can also be obtained from simple dc measurements by extracting the N it from the measured SS. However, this method is only applicable if (and only if) the used model for SS takes into account the important physical phenomena that have an impact on SS.…”

Section: Solving the Singularity Related To Interface Statesmentioning

confidence: 99%

Theoretical Limit of Low Temperature Subthreshold Swing in Field-Effect Transistors

Beckers

Jazaeri

Enz

2020

IEEE Electron Device Lett.

147

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Measurements in field-effect transistors have indicated that the Boltzmann thermal limit of the subthreshold swing, (k B T /q) ln 10, is not followed down to deep-cryogenic temperatures. Instead, there is a nonlinear deviation from this limit which cannot be explained with the present theory. In this paper, we derive a new theory which resolves this discrepancy by including the source-drain tunneling through a band tail. We demonstrate that the additional tunneling component of the current becomes dominant over the diffusion current at a sufficiently low cryogenic temperature. A band tail in the electrostatics, with only diffusion transport, does not explain the excess subthreshold swing at deep-cryogenic temperatures, neither does only self-heating, nor does a nonuniform density of interface traps in the bandgap with Fermi-Dirac occupation. The proposed theory is experimentally validated with our measurements in advanced CMOS technology down to 4.2 K. Finally, we assess the obtained densities of interface traps in the presence of band-tail tunneling.

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Section: Solving the Singularity Related To Interface Statesmentioning

confidence: 99%