Vacuum arc deposition of multilayer X-ray mirrors

Anders, S.; Anders, André; Kortright, Jeffrey B.; Yu, K. M.; Brown, Ian; Ivanov, I.

doi:10.1016/0257-8972(93)90235-g

Cited by 10 publications

(3 citation statements)

References 12 publications

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“…The avoidance of intermixing between layers is also of critical importance to x-ray optics multilayers. While energetic condensation of carbon is desirable to make a dense low-Z material, the high-Z material must not be deposited in an energetic way [121,122].…”

Section: Graded Layers Ultrathin Films Multilayers Nanolaminatesmentioning

confidence: 99%

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Metal plasmas for the fabrication of nanostructures

Anders¹

2007

J. Phys. D: Appl. Phys.

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A review is provided covering metal plasma production, the energetic condensation of metal plasmas, and the formation of nanostructures using such plasmas. Plasma production techniques include pulsed laser ablation, filtered cathodic arcs, and various forms of ionized physical vapor deposition, namely magnetron sputtering with ionization of sputtered atoms in radio frequency discharges, self-sputtering, and high power impulse magnetron sputtering. The discussion of energetic condensation focuses on the control of kinetic energy by biasing and also includes considerations of the potential energy and the processes occurring at subplantation and implantation. In the final section on nanostructures, two different approaches are discussed. In the top-down approach, the primary nanostructures are lithographically produced and metal plasma is used to coat or fill trenches and vias. Additionally, multilayers with nanosize periods (nanolaminates) can be produced. In the bottom-up approach, thermodynamic forces are used to fabricate nanocomposites and nanoporous materials by decomposition and dealloying.

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Section: Graded Layers Ultrathin Films Multilayers Nanolaminatesmentioning

confidence: 99%

“…While energetic condensation of carbon is desirable to make a dense low-Z material, the high-Z material must not be deposited in an energetic way [76,77].…”

Section: Graded Layers Ultrathin Films Multilayers Nanolaminatesmentioning

confidence: 99%

Metal plasmas for the fabrication of nanostructures

Anders¹

2007

J. Phys. D: Appl. Phys.

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“…Multilayered films are used in a variety of applications such as magnetic recording media, X-ray mirrors, diffusion barrier coatings and wear resistant coatings due to their superior physical properties (magnetic, optical and mechanical) [1][2][3]. Moreover, multilayers can be considered as characteristic model of nanomaterials, so they are also well suited for fundamental studies of the effects of length scale, in the micrometer to nanometer thickness range, on the strengthening mechanisms in nanocomposites [4,5].…”

Section: Introductionmentioning

confidence: 99%