2016
DOI: 10.1016/j.actamat.2016.02.003
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Thermal stability of Cu/W nano-multilayers

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Cited by 80 publications
(66 citation statements)
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“…formation of line-shaped protrusions at the temperature higher than 500°Cand degradation of the nanolayered structure at temperatures higher than 700°C. The initial multilayer structures completely disintegrate into a nanocomposite structure, comprising globular W particles embedded in a Cu matrix [11].…”
Section: Introductionmentioning
confidence: 99%
“…formation of line-shaped protrusions at the temperature higher than 500°Cand degradation of the nanolayered structure at temperatures higher than 700°C. The initial multilayer structures completely disintegrate into a nanocomposite structure, comprising globular W particles embedded in a Cu matrix [11].…”
Section: Introductionmentioning
confidence: 99%
“…As shown by these studies, in the as deposited state very high compressive stresses (related mainly to growth stresses initiate by the PVD process) were observed in the confined Cu (≈ -1.5 GPa) and W layers (≈ -3.5 GPa) [19]. Annealing up to 500 ºC fully releases the stresses of the Cu nanolayers [19], which also coincides with the temperature at which a high number of Cu protrusions appear on the surface [18]. At T > 700 ºC, degradation of the NML structure occurs [18,19].…”
Section: Methodsmentioning
confidence: 74%
“…2b and 3b). The microstructural evolution upon heating of the same Cu/W NML system (deposited on sapphire) has been studied in detail [18] and the corresponding stress evolution was comprehensively investigated [19]. As shown by these studies, in the as deposited state very high compressive stresses (related mainly to growth stresses initiate by the PVD process) were observed in the confined Cu (≈ -1.5 GPa) and W layers (≈ -3.5 GPa) [19].…”
Section: Methodsmentioning
confidence: 93%
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