Metal plasmas for the fabrication of nanostructures

Anders, André

doi:10.1088/0022-3727/40/8/s06

Cited by 77 publications

(62 citation statements)

References 137 publications

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“…The possibility to build up nano-plasma materials makes them attractive for applications such as antenna systems and elements of millimetre wave electronic devices [9]. Reference [10] presents the material devoted to various technologies for metal plasma production, especially on the formation of nanostructures using the metal-plasmas. These techniques allow one to obtain a trench-filling and a conformal coating of a substrate surface down to the 100 nm size; to fabricate super-hard and tough nano-structures by depositing the titanium-aluminium and titanium-zirconium films and even to reduce the friction coefficient between nano-structures by incorporating the ions of yttrium or vanadium.…”

Section: Introductionmentioning

confidence: 99%

Higher Radial Modes of Azimuthal Surface Waves in Cylindrical Waveguides Without External Magnetic Field

Гірка¹,

Omelchenko²,

Sydora³

2017

PIER M

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Abstract-The properties of higher order radial modes of electromagnetic azimuthal surface-type waves (ASW) which propagate in partially plasma-filled cylindrical waveguides without external magnetic field are analyzed using analytical and numerical techniques. For a waveguide with plasma surrounded by dielectric material and encased in metal, the eigenfrequencies for higher order radial modes are obtained. It is found that the ASW higher radial modes propagate with shorter vacuum wavelength than the zeroth order radial modes and that the more favourable conditions for higher order radial mode propagation are for ASW's with larger azimuthal wavenumber in waveguides with wider dielectric layer and larger dielectric constant. A further salient feature of ASW higher radial modes is that a change in plasma waveguide parameters causes a drastic change in ASW eigenfrequency in contrast to the zero-th order modes which have a smoother frequency variation with effective wavenumber.

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Section: Introductionmentioning

confidence: 99%

Higher Radial Modes of Azimuthal Surface Waves in Cylindrical Waveguides Without External Magnetic Field

Гірка¹,

Omelchenko²,

Sydora³

2017

PIER M

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“…25,27 In this study, the phase separation during the C:Ni film growth under energetic physical vapor deposition ͑PVD͒ conditions is studied. Although the two elements form a metastable Ni 3 C, 30,31 excess carbon is quickly expelled from the carbide phase. The influence of film composition, the energy and incidence angle of incoming species on the film morphology is investigated.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

Abrasonis

Oates

Kovács

et al. 2010

Journal of Applied Physics

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Periodic precipitation patterns in C:Ni nanocomposites grown by energetic ion codeposition are investigated. Films were grown at room temperature by ionized physical vapor deposition using a pulsed filtered cathodic vacuum arc. We reveal the role of the film composition, ion energy and incidence angle on the film morphology using transmission electron microscopy and grazing incidence small angle x-ray scattering. Under these growth conditions, phase separation occurs in a thin surface layer which has a high atomic mobility due to energetic ion impacts. This layer is an advancing reaction front, which switches to an oscillatory mode, producing periodic precipitation patterns. Our results show that the ion induced atomic mobility is not random, as it would be in the case of thermal diffusion but conserves to a large extent the initial direction of the incoming ions. This results in a tilted pattern under oblique ion incidence. A dependence of the nanopattern periodicity and tilt on the growth parameters is established and pattern morphology control via ion velocity is demonstrated.

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“…However, there are a few obstacles in obtaining size-uniform nanostructures with high throughput and at a low cost. Plasmabased growth methods [115,[118][119][120] have been shown to be promising controllable bottom-up alternatives for size-uniform and size-controlled growth. For example, it was demonstrated numerically [118,119] that plasmas lead to a greater degree of nanostructure size uniformity than is possible in a neutral gas-based selforganized process.…”

Section: Tailoring Metal Nanoarraysmentioning

confidence: 99%

“…Moreover a recent review on the use of metal vapour plasmas for the growth of metal nanostructures [115], noted that there were a number of options including ionised physical vapour deposition (iPVD) based on sputtering (more appropriate for Ag), as well as pulsed laser deposition, filtered cathodic arcs, etc. The benefit of using plasma-enhanced magnetron sputtering is that it is possible to exert a high level of control over both the direction and the energy of the charged particles.…”

Section: Tailoring Metal Nanoarraysmentioning

confidence: 99%

“…Low-temperature, non-equilibrium plasmas are a particularly versatile tool for this purpose [6] and may be used for all stages of the growth process from generation of building and working units in the plasma bulk (building units are the material that make up the nanostructure, working units prepare the surface for deposition), through to surface preparation, directed transport of materials to the surface, nanoassembly of highly-tailored structures as well as functionalisation and post-processing of arrays. A review by Anders [115] highlighted the use of plasmas of metal vapours for production of metal nanostructures. An interesting point to note is that these plasmas of metal vapours can be tailored to produce metal plasmas (i.e., collective electron oscillations with respect to the positive ion background in the metal nanoparticles from the condensing of the metal vapour).…”

Section: Introduction To Plasma Nanosciencementioning

confidence: 99%

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Plasmas meet plasmonics

2012

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Abstract. The term 'plasmon' was first coined in 1956 to describe collective electronic oscillations in solids which were very similar to electronic oscillations/surface waves in a plasma discharge (effectively the same formulae can be used to describe the frequencies of these physical phenomena). Surface waves originating in a plasma were initially considered to be just a tool for basic research, until they were successfully used for the generation of large-area plasmas for nanoscale materials synthesis and processing. To demonstrate the synergies between 'plasmons' and 'plasmas', these large-area plasmas can be used to make plasmonic nanostructures which functionally enhance a range of emerging devices. The incorporation of plasmafabricated metal-based nanostructures into plasmonic devices is the missing link needed to bridge not only surface waves from traditional plasma physics and surface plasmons from optics, but also, more topically, macroscopic gaseous and nanoscale metal plasmas. This article first presents a brief review of surface waves and surface plasmons, then describe how these areas of research may be linked through Plasma Nanoscience showing, by closely looking at the essential physics as well as current and future applications, how everything old, is new, once again.

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Metal plasmas for the fabrication of nanostructures

Cited by 77 publications

References 137 publications

Higher Radial Modes of Azimuthal Surface Waves in Cylindrical Waveguides Without External Magnetic Field

Higher Radial Modes of Azimuthal Surface Waves in Cylindrical Waveguides Without External Magnetic Field

Nanoscale precipitation patterns in carbon–nickel nanocomposite thin films: Period and tilt control via ion energy and deposition angle

Plasmas meet plasmonics

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