“…These technical problems can be, at least partially, overcome by growing amorphous silicon nanoparticles [22]. They are usually grown upon annealing at Tp970 K [17,[22][23][24][25][26] and, in addition, one can expect that internal strains in na-Si should be smaller than those in nc-Si. It has been observed [17,27] that the PL intensity from SiO x annealed at To1100 K is higher than that from films with the same initial composition but annealed at T41200 K which can be considered as confirmation of this expectation.…”