Preferred orientations in nano-gold/silica/silicon interfaces

Vasisht, Sanjeev; Shirokoff, John

doi:10.1016/j.apsusc.2010.02.090

Cited by 8 publications

(3 citation statements)

References 42 publications

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“…(2) should hold better only for the four samples with a < 25%. Moreover, the series of samples grown at the lower temperature of 100 o C may have particle shapes that deviate from the thermodynamic equilibrium shape, which should be spherical (Vasisht and Shirokoff 2010). Therefore we attempted calculations only for the high deposition temperature samples.…”

Section: Resultsmentioning

confidence: 99%

“…In our case, the deposition temperature is kept in relatively high values. This allows the particles to take easier their final equilibrium nearly spherical shape (Vasisht and Shirokoff 2010). The deposition temperature is more effective than the same temperature of annealing continuous films; even relatively high deposition temperature allows the sample to obtain the equilibrium shape immediately during deposition without the need to overcome thermodynamic diffusion barriers that may be introduced when a continuous or semi-continuous film is formed at low deposition temperatures.…”

Section: Introductionmentioning

confidence: 99%

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Self-assembled Au nanoparticles on heated Corning glass by dc magnetron sputtering: size-dependent surface plasmon resonance tuning

et al. 2013

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We report on the growth of Au nanoparticles on Corning glass by direct current magnetron sputtering and on the optical absorption of the films. The substrate temperature was kept to relatively high temperatures of 100 o C or 450 o C. This lead to the growth of Au nanoparticles instead of smooth Au films as the surface energy of Au is much larger than the one of glass.The size of the particles depended on the substrate temperature and deposition time and was shown to follow a logarithmic normal distribution function. Both, the surface plasmon resonance position and bandwidth, were found to depend upon the average particle size. The surface plasmon resonance position showed a 75 nm continuous blue shift from 14 nm down to 2.5 nm average particle size. Thus, we have shown how to tune the nanoparticle size and surface plasmon resonance of Au by varying the substrate temperature and deposition time.The experimental results are reproduced reasonably using a method which is based on the size-and wavelength-dependent complex dielectric function of Au within the framework of the Mie theory for the optical properties of metallic nanospheres.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Self-assembled Au nanoparticles on heated Corning glass by dc magnetron sputtering: size-dependent surface plasmon resonance tuning

et al. 2013

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“…As FIB patterning and ALD are both applicable for 3D nanofabrication, they can be used for fabrication of a 3D mask. To demonstrate this we used gold particles that were randomly splashed on the sample surface from a molten Au source during Au evaporation [31]. The sample with these 3D gold particles was coated by ALD with the oxide multilayer (sequentially grown 200 nm Al 2 O 3 , 60 nm Ta 2 O 5 and 50 nm Al 2 O 3 ) so that 3D film stacks were conformally formed on the gold particles.…”

Section: Interlayer Metal Connection and Resistor Fabricationmentioning

confidence: 99%

Metal oxide multilayer hard mask system for 3D nanofabrication

et al. 2018

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We demonstrate the preparation and exploitation of multilayer metal oxide hard masks for lithography and 3D nanofabrication. Atomic layer deposition (ALD) and focused ion beam (FIB) technologies are applied for mask deposition and mask patterning, respectively. A combination of ALD and FIB was used and a patterning procedure was developed to avoid the ion beam defects commonly met when using FIB alone for microfabrication. ALD grown AlO/TaO/AlO thin film stacks were FIB milled with 30 keV gallium ions and chemically etched in 5% tetramethylammonium hydroxide at 50 °C. With metal evaporation, multilayers consisting of amorphous oxides AlO and TaO can be tailored for use in 2D lift-off processing, in preparation of embedded sub-100 nm metal lines and for multilevel electrical contacts. Good pattern transfer was achieved by lift-off process from the 2D hard mask for micro- and nano-scaled fabrication. As a demonstration of the applicability of this method to 3D structures, self-supporting 3D TaO masks were made from a film stack on gold particles. Finally, thin film resistors were fabricated by utilizing controlled stiction of suspended TaO structures.

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Sintering characteristics and grain growth behavior of MgO nanopowders by spark plasma sintering

Zhang

Song

et al. 2014

Journal of Alloys and Compounds

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Preferred orientations in nano-gold/silica/silicon interfaces

Cited by 8 publications

References 42 publications

Self-assembled Au nanoparticles on heated Corning glass by dc magnetron sputtering: size-dependent surface plasmon resonance tuning

Self-assembled Au nanoparticles on heated Corning glass by dc magnetron sputtering: size-dependent surface plasmon resonance tuning

Metal oxide multilayer hard mask system for 3D nanofabrication

Sintering characteristics and grain growth behavior of MgO nanopowders by spark plasma sintering

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