2000
DOI: 10.1557/s1092578300000065
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UV-Specific (320-365 nm) Digital Camera Based On a 128×128 Focal Plane Array of GaN/AlGaN p-i-n Photodiodes

Abstract: An ultraviolet-specific (320-365 nm) digital camera based on a 128×128 array of backside-illuminated GaN/AlGaN p-i-n photodiodes has been successfully developed. The diode structure consists of a base n-type layer of AlGaN (~23% Al) followed by undoped and then p-type GaN layers deposited by metal organic vapor phase epitaxy. Double-side polished sapphire wafers serve as transparent substrates. Standard photolithographic, etching, and metallization procedures were employed to fabricate the devices. The fully-p… Show more

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Cited by 29 publications
(4 citation statements)
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“…The incorporation of the different additives into the cellulose network altered mainly the characteristics of the films in the ultraviolet (UV) region (200–400 nm). An enhanced light transmittance of films in this region is of importance for some UV optoelectronic devices, such as light emitting diodes (LEDs) 20 and photodiodes 21 23 .
Figure 4 Light transmittance of films made of: ( a ) TOCNF and PVA, ( b ) TOCNF and Gx, ( c ) TOCNF and AZC, ( d ) TOCNF, PVA and Gx, ( e ) TOCNF, PVA and AZC.
…”
Section: Resultsmentioning
confidence: 99%
“…The incorporation of the different additives into the cellulose network altered mainly the characteristics of the films in the ultraviolet (UV) region (200–400 nm). An enhanced light transmittance of films in this region is of importance for some UV optoelectronic devices, such as light emitting diodes (LEDs) 20 and photodiodes 21 23 .
Figure 4 Light transmittance of films made of: ( a ) TOCNF and PVA, ( b ) TOCNF and Gx, ( c ) TOCNF and AZC, ( d ) TOCNF, PVA and Gx, ( e ) TOCNF, PVA and AZC.
…”
Section: Resultsmentioning
confidence: 99%
“…Despite these technical difficulties, several groups have achieved limited success in demonstrating visible and solar-blind focal plane array (FPA) cameras of various sizes. 4,5,6,7 In this paper we present the results of a 320 x 256 AlGaN based solar-blind focal plane array camera, and then discuss future improvements that could improve the imaging performance. We start by looking at the I-V and photoresponse characteristics of single 25 µm x 25 µm pixel AlGaN-based solar-blind photodetectors.…”
Section: Introductionmentioning
confidence: 99%
“…Applications for UV imagers include biological agent detection, missile and shellfire detection, atmospheric ozone-level detection, welding imagery and flame sensing. Additionally, large-format UV staring FPAs based on GaN photodiodes may play an important role in obtaining UV images of the stars and other astronomical objects of importance for understanding the creation and evolution of the universe [3].…”
Section: Introductionmentioning
confidence: 99%