UV-nil based fabrication of plasmon-magnetic nanoparticles for biomolecular sensing

Haslinger, Michael J.; Mitteramskogler, Tina; Shoshi, Astrit; Schotter, Joerg; Schrittwieser, Stefan; Mühlberger, M.; Brückl, Hubert

doi:10.1117/12.2321036

Cited by 3 publications

(3 citation statements)

References 11 publications

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“…This accounts for the whole imprinted area of 1 × 1 cm 2 . With an inverse imprint structure of the same master, it was recently shown that a very narrow size variation of the imprinted structures is achieved, resulting in a standard deviation of the area of the elliptical base of +/−3% [35]. Next, the sample was coated by sputter deposition with a Au film of 50 nm thickness.…”

Section: Resultsmentioning

confidence: 99%

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Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography

et al. 2019

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Nanostructured surfaces and nanoparticles are already widely employed in many different fields of research, and there is an ever-growing demand for reliable, reproducible and scalable nanofabrication methods. This is especially valid for multifunctional nanomaterials with physical properties that are tailored for specific applications. Here, we report on the fabrication of two types of nanomaterials. Specifically, we present surfaces comprising a highly uniform array of elliptical pillars as well as nanoparticles with the shape of nanopockets, possessing nano-cavities. The structures are fabricated by nanoimprint lithography, physical and wet-chemical etching and sputter deposition of thin films of various materials to achieve a multifunctional nanomaterial with defined optical and magnetic properties. We show that the nanopockets can be transferred to solution, yielding a nanoparticle dispersion. All fabrication steps are carefully characterized by microscopic and optical methods. Additionally, we show optical simulation results that are in good agreement with the experimentally obtained data. Thus, this versatile method allows to fabricate nanomaterials with specific tailor-made physical properties that can be designed by modelling prior to the actual fabrication process. Finally, we discuss possible application areas of these nanomaterials, which range from biology and medicine to electronics, photovoltaics and photocatalysis.

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Section: Resultsmentioning

confidence: 99%

“…From the master, a hybrid stamp composed of polydimethylsiloxane (PDMS) and hard PDMS (h-PDMS) was fabricated by methods reported in literature (see also Figure 1c for a schematic representation of the stamp) [33,34]. The process of the UV-NIL imprint with an inverse structure was in parts presented recently [35,36].…”

Section: Methodsmentioning

confidence: 99%

Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography

et al. 2019

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“…We call such a process also an additive NIL process. Of course, the nanoimprint material can also be used as an etching mask or in a lift-off process 7 , in a subtractive NIL process.…”

Section: Introductionmentioning

confidence: 99%

Direct patterning of functional materials using nanoimprint lithography

Haslinger,

Kopp,

Jonaityte

et al. 2023

38th European Mask and Lithography Conference (EMLC 2023)

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Industrial view of plasmonic devices made by nanoimprint or injection molding

Prinz¹,

Haslinger

Mühlberger

et al. 2021

Journal of Applied Physics

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We present a perspective of the industrial realization of plasmonic devices especially for life science and in vitro diagnostic applications. The main focus is on the manufacturing technologies Nanoimprint Lithography and injection molding as scalable processes for high volume manufacturing. Both technologies have their individual strengths and technical restrictions, which are discussed along different examples for plasmonic applications especially for biosensor applications.

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UV-nil based fabrication of plasmon-magnetic nanoparticles for biomolecular sensing

Cited by 3 publications

References 11 publications

Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography

Multifunctional Nanostructures and Nanopocket Particles Fabricated by Nanoimprint Lithography

Direct patterning of functional materials using nanoimprint lithography

Industrial view of plasmonic devices made by nanoimprint or injection molding

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