1997
DOI: 10.1021/ac961038q
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UV Laser Machined Polymer Substrates for the Development of Microdiagnostic Systems

Abstract: This report describes a UV laser photoablation method for the production of miniaturized liquid-handling systems on polymer substrate chips. The fabrication of fluid channel and reservoir networks is accomplished by firing 200 mJ pulses from an UV excimer laser at substrates moving in predefined computer-controlled patterns. This method was used for producing channels in polystyrene, polycarbonate, cellulose acetate, and poly(ethylene terephthalate). Efficient sealing of the resulting photoablated polymer chan… Show more

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Cited by 483 publications
(387 citation statements)
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“…This can be accomplished by spin-coating a resist over the chromium/ quartz plate and then transferring the design (optical proximity printing); developing the resist; and finally, etching the chromium to remove exposed metal. A typical channel fabricated in polycarbonate is shown in Figure 1b (9). The angles of the 75-µm side walls are sharp and vertical.…”
Section: Microfabrication Techniquesmentioning
confidence: 99%
“…This can be accomplished by spin-coating a resist over the chromium/ quartz plate and then transferring the design (optical proximity printing); developing the resist; and finally, etching the chromium to remove exposed metal. A typical channel fabricated in polycarbonate is shown in Figure 1b (9). The angles of the 75-µm side walls are sharp and vertical.…”
Section: Microfabrication Techniquesmentioning
confidence: 99%
“…The fabrication of microchip has been previously described [26]. Briefly, the PET sheet is photoablated by a UV excimer laser (Argon Fluor Excimer Laser at 193 nm; Lambda Physik LPX 2051, Göttingen, Germany).…”
Section: Microchip Fabricationmentioning
confidence: 99%
“…This approach was used to elegantly reduce band broadening around 907 turns by selectively modifying the surface charge of the outer-wall. The approach of laser modification of channel surfaces has also been applied to other polymeric substrates including polystyrene, cellulose acetate, PETG, poly(vinyl chloride), and polycarbonate [30,88].…”
Section: Pmma Substratesmentioning
confidence: 99%
“…There are, however, some manufacturing issues associated with glass microchips, which makes the use of alternative materials like different polymers attractive [28]. An advantage of polymer-based microfluidic chips is the wide choice in microfabrication techniques like injection molding [29], laser ablation [30], imprinting [31], or hot embossing [32]. For such microfluidic devices inexpensive mass production is possible which makes them attractive as disposable devices for commercial applications.…”
Section: Introductionmentioning
confidence: 99%