2010
DOI: 10.1007/978-3-642-11598-1_12 View full text |Buy / Rent full text
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Abstract: The measurement of features from the micro-and precision manufacturing industries requires low uncertainties and nano-scale resolution. These are best delivered through ultra precise co-ordinate measuring machines (CMMs). However, current CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro-CMM probe. The probe is comprised of a 70 µm glass sphere, attached to a solid tungsten-carbide shaft of diameter less than 100 µm, jo… Show more

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“…The assembly of the flexure chip and the sphere-tipped stylus, to produce the vibrating micro-CMM probe presents a number of challenges [8]. These include, but are not limited to, the delicate nature of the flexures (nominally 20 µm thick), the difficulty in handling millimetre-sized parts, the change of forces dominant on the operation and the limited view of the operation.…”
Section: Assembly Trials At Nplmentioning
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“…The assembly of the flexure chip and the sphere-tipped stylus, to produce the vibrating micro-CMM probe presents a number of challenges [8]. These include, but are not limited to, the delicate nature of the flexures (nominally 20 µm thick), the difficulty in handling millimetre-sized parts, the change of forces dominant on the operation and the limited view of the operation.…”
Section: Assembly Trials At Nplmentioning
“…These include, but are not limited to, the delicate nature of the flexures (nominally 20 µm thick), the difficulty in handling millimetre-sized parts, the change of forces dominant on the operation and the limited view of the operation. The ideal physical requirements of the assembly of the stylus onto the chip are a positional accuracy of ± 0.5 µm and that the angle between the two be 90º ± 0.29º [8].…”
Section: Assembly Trials At Nplmentioning
“…20 Assembly of a micro-sphere (70 µm ) onto the shaft using a FIB/SEM machine[127]. Effect of scaling on the fluid load According to Equation (6.2), both the fluid induced damping and mass are functions of the radius of the sphere.…”
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