Using single source precursors and spray chemical vapor deposition to grow thin-film CuInS/sub 2/ [solar cells]

CuInS2 films deposited by aerosol-assisted chemical vapor deposition using ternary single-source precursors

“…The dendritic microstructure (film IV, figure 1(c)) showed non-faceted and elongated grains, which were also observed in films grown with solid SSPs in reactor A. 5 This was studied previously, and it was concluded to be a consequence of diffusionlimited growth. 24 By increasing the flow rate, dense and faceted trigonal-shaped grains were obtained (film V, figure 1(d)).…”

“…18 The description of the deposition processes for five representative films (film I, II, III, IV, and V) is summarized in Table I, and a detailed film growth process with schematics of the reactors can be found elsewhere. 5,6 Glass slides (Corning 2947 and 7059) and molybdenum coated slides were typically used as the substrate. Molybdenum was deposited by radio-frequency magnetic sputtering (Materials Research Corporation), and commercial Mo foil substrates were also used.…”

“…It was successfully shown that SSPs' thermal properties were appropriate for a low-temperature process, 3,4 and film deposition using both solid and liquid SSPs in aerosol-assisted chemical vapor deposition (AACVD) reactors has been demonstrated. 5,6 AACVD is a useful alternative to conventional CVD when the vapor pressure of the precursor is too low for conventional CVD since it provides facile delivery of a precursor to a heated substrate by spraying it into a hot zone, followed by evaporation over a heated substrate. 7 CuInS 2 is a wide band gap chalcopyrite, and it is a promising material for thin film solar cells because of its near optimum direct band gap of 1.5 eV, and its possible use as a top cell in a tandem structure with CIGS.…”